7 results on '"Guillaume, Thomas"'
Search Results
2. Nanoengineering DNA origami for lithography
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Marie Marmiesse, Xavier Baillin, Raluca Tiron, Shimon Levi, and Guillaume Thomas
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chemistry.chemical_compound ,Materials science ,Si substrate ,chemistry ,Dna nanostructures ,DNA nanotechnology ,High density ,DNA origami ,Nanotechnology ,Nanoengineering ,Lithography ,DNA - Abstract
DNA nanotechnology has shown great promise for nanopatterning applications thanks to the ability to nanoengineer rationally designed two and three-dimensional (3D) nano-objects of complex shapes with subnanometer precision and high degree of rigidity [1]. Recently, a self-assembled DNA origami allowing sub-10 nm pattern transfer into SiO2 has been demonstrated [2]. We report here a mechanistic study of a high resolution (10 nm) and high density (10 nm) DNA pattern transfer into a Si substrate. In order to exploit their full potential for lithographic application, the deterministic positioning of the DNA nanostructures on a predefined substrate is still a major challenge to overcome. In a second part of this paper, we present a hybrid nanopatterning process by combining locally chemically modified substrate by top-down technics with bottom-up self-assembly of DNA nanostructures in order to deterministically fix DNA origamis on the substrate. Chemical contrast is formed using conventional lithography in order to create DNA affine and adverse parts on the substrate. The pattern transfer of the DNA nanostructures in the inorganic under layer is demonstrated as well. Thus, DNA origami appears to be a promising emerging approach for the engineering of hard masks for patterning.
- Published
- 2020
3. Detection of Organophosphorous Chemical Agents with CuO-Nanorod-Modified Microcantilevers
- Author
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Laurent Schlur, Denis Spitzer, Pierre Agostini, Geoffrey Gerer, Jacques Grau, and Guillaume Thomas
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Copper oxide ,Nanostructure ,Materials science ,Hydrogen ,chemistry.chemical_element ,02 engineering and technology ,sensors ,lcsh:Chemical technology ,01 natural sciences ,Biochemistry ,Article ,Analytical Chemistry ,chemistry.chemical_compound ,Wafer ,lcsh:TP1-1185 ,Electrical and Electronic Engineering ,cuo/cu(oh)2 nanorods ,dmmp detection ,Instrumentation ,nanostructured sensors ,organophosphorous ,Dimethyl methylphosphonate ,010401 analytical chemistry ,021001 nanoscience & nanotechnology ,Copper ,Atomic and Molecular Physics, and Optics ,0104 chemical sciences ,selective detection ,chemistry ,Chemical engineering ,Nanorod ,microcantilevers ,0210 nano-technology ,Layer (electronics) - Abstract
Microcantilevers are really promising sensitive sensors despite their small surface. In order to increase this surface and consequently their sensitivity, we nanostructured them with copper oxide (CuO) nanorods. The synthesis of the nanostructure consists of the oxidation of a copper layer deposited beforehand on the surface of the sample. The oxidation is performed in an alkaline solution containing a mixture of Na(OH) and (NH4)2S2O8. The synthesis procedure was first optimized on a silicon wafer, then transferred to optical cantilever-based sensors. This transfer requires specific synthesis modifications in order to cover all the cantilever with nanorods. A masking procedure was specially developed and the copper layer deposition was also optimized. These nanostructured cantilevers were engineered in order to detect vapors of organophosphorous chemical warfare agents (CWA). The nanostructured microcantilevers were exposed to various concentration of dimethyl methylphosphonate (DMMP) which is a well-known simulant of sarin (GB). The detection measurements showed that copper oxide is able to detect DMMP via hydrogen interactions. The results showed also that the increase of the microcantilever surface with the nanostructures improves the sensors efficiency. The evolution of the detection performances of the CuO nanostructured cantilevers with the DMMP concentration was also evaluated.
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- 2020
4. DNA Origami for Silicon Patterning
- Author
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Raluca Tiron, Thierry Chevolleau, Guillaume Thomas, Cheikh Tidiane Diagne, Thomas Charvolin, Xavier Baillin, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), Silicon Nanoelectronics Photonics and Structures (SiNaps), PHotonique, ELectronique et Ingénierie QuantiqueS (PHELIQS), Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), and Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA)
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Silicon ,Materials science ,Plasma Gases ,Surface Properties ,Silicon dioxide ,Scanning electron microscope ,chemistry.chemical_element ,Hydrofluoric Acid ,Hydrobromic Acid ,chemistry.chemical_compound ,Nanotechnology ,DNA origami ,Microelectronics ,General Materials Science ,Lithography ,ComputingMilieux_MISCELLANEOUS ,[PHYS]Physics [physics] ,Plasma etching ,business.industry ,DNA ,Silicon Dioxide ,Nanostructures ,Oxygen ,chemistry ,Printing ,Optoelectronics ,Adsorption ,business ,Layer (electronics) - Abstract
Desoxyribonucleic acid (DNA) origami architectures are a promising tool for ultimate lithography because of their ability to generate nanostructures with a minimum feature size down to 2 nm. In this paper, we developed a method for silicon (Si) nanopatterning to face up current limitations for high-resolution patterning with standard microelectronic processes. For the first time, a 2 nm-thick 2D DNA origami mask, with specific design composed of three different square holes (with a size of 10 and 20 nm), is used for positive pattern transfer into a Si substrate using a 15 nm-thick silicon dioxide (SiO2) layer as an intermediate hard mask. First, the origami mask is transferred onto the SiO2 underlayer, by an HF vapor-etching process. Then, the Si underlayer is etched using an HBr/O2 plasma. Each hole is transferred in the SiO2 layer and the 20 nm-sized holes are transferred into the final stack (Si). The resulting patterns exhibited a lateral resolution in the range of 20 nm and a depth of 40 nm. Patterns are fully characterized by atomic force microscopy, scanning electron microscopy, focused ion beam-transmission electron microscopy, and ellipsometry measurements.
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- 2020
5. Double side nanostructuring of microcantilever sensors with TiO2-NTs as a route to enhance their sensitivity
- Author
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Laurent Schlur, Guillaume Thomas, Thomas Cottineau, Denis Spitzer, Geoffrey Gerer, Fabien Schnell, Valérie Keller, Nanomatériaux pour les Systèmes Sous Sollicitations Extrêmes (NS3E), ISL-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA), Institut de chimie et procédés pour l'énergie, l'environnement et la santé (ICPEES), Université de Strasbourg (UNISTRA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et nanosciences d'Alsace (FMNGE), Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS), KELLER, Valérie, Université de Strasbourg (UNISTRA)-ISL-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Université de Strasbourg (UNISTRA)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Matériaux et Nanosciences Grand-Est (MNGE), Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS), Université de Strasbourg (UNISTRA)-Matériaux et nanosciences d'Alsace (FMNGE), and Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Institut de Chimie du CNRS (INC)-Université de Strasbourg (UNISTRA)-Université de Haute-Alsace (UHA) Mulhouse - Colmar (Université de Haute-Alsace (UHA))-Institut National de la Santé et de la Recherche Médicale (INSERM)-Centre National de la Recherche Scientifique (CNRS)-Centre National de la Recherche Scientifique (CNRS)
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Nanostructure ,Materials science ,[CHIM.ANAL] Chemical Sciences/Analytical chemistry ,Silicon ,chemistry.chemical_element ,One-Step ,02 engineering and technology ,010402 general chemistry ,01 natural sciences ,law.invention ,chemistry.chemical_compound ,law ,[CHIM.ANAL]Chemical Sciences/Analytical chemistry ,General Materials Science ,[PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] ,Anodizing ,business.industry ,Dimethyl methylphosphonate ,021001 nanoscience & nanotechnology ,0104 chemical sciences ,Photodiode ,Amorphous solid ,chemistry ,[PHYS.PHYS.PHYS-INS-DET] Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] ,Titanium dioxide ,Optoelectronics ,0210 nano-technology ,business - Abstract
International audience; We reported a new strategy to enhance the sensing performances of a commercial microcantilever with optical readout in dynamic mode for the vapor detection of organophosphorus compounds (OPs). In order to increase significantly the surface area accessible to the molecules in the vapor phase, we nanostructured both sides of the microcantilever with ordered, open and vertically oriented amorphous titanium dioxide nanotubes (TiO2-NTs) in one step by an anodization method. However, due to the aggressive conditions of anodization synthesis it remains a real challenge to nanostructure both sides of the microcantilever. Consequently, we developed and optimized a protocol of synthesis to overcome these harsh conditions which can lead to the total destruction of the silicon microcantilever. Moreover, this protocol was also elaborated in order to maintain a good reflection of the laser beam on one side of the microcantilever towards the position sensitive photodiode and limit the light diffusion by the NTs film. The results related to the detection of dimethyl methylphosphonate (DMMP) showed that TiO2 and the nanostructuring on both sides of the microcantilever with NTs indeed improved the response of the sensor to vapors compared to a microcantilever nanostructured on only one side. The dimensions and morphology of NTs guaranteed the access of molecules to the surface of NTs. This approach showed promising prospects to enhance the sensing performances of microcantilevers.
- Published
- 2020
6. Efficient functionalization of magnetite nanoparticles with phosphonate using a one-step continuous hydrothermal process
- Author
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Guillaume Thomas, Nadine Millot, Frédéric Demoisson, and Julien Boudon
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chemistry.chemical_classification ,technology, industry, and agriculture ,02 engineering and technology ,Polyethylene glycol ,Polymer ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,Phosphonate ,Hydrothermal circulation ,0104 chemical sciences ,Inorganic Chemistry ,chemistry.chemical_compound ,Colloid ,chemistry ,Chemical engineering ,Oxidation state ,Specific surface area ,Organic chemistry ,Surface modification ,0210 nano-technology - Abstract
For the first time, phosphonate-functionalized magnetite nanoparticles (Fe3O4 NPs) were synthesized using a one-step continuous hydrothermal process. The NP surface was modified using a hydrophilic organic molecule, namely 6-phosphonohexanoic acid (PHA). NPs were fully characterized (TEM, XRD, DLS, ζ-potential, TGA, FTIR, XPS and specific surface area measurements) in order to investigate PHA effect on size, oxidation state, anchoring and colloidal stability. PHA reduced the crystallite size and size distribution and improved greatly colloidal stability when compared with bare Fe3O4 NPs. Moreover, PHA was grafted on the NP surface according to three different conformations: as mononuclear monodendates, as binuclear bidentates or as lying-down complexes. This report is very promising regarding the stabilization and functionalization of Fe3O4 NPs by phosphonate molecules under continuous hydrothermal conditions. The post-grafting of polymers such as polyethylene glycol can be considered owing to the presence of free carboxyl groups (-COOH) on the surface of Fe3O4 NPs.
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- 2016
7. One-step continuous synthesis of functionalized magnetite nanoflowers
- Author
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E Popova, Guillaume Thomas, Nadine Millot, Rémi Chassagnon, and Frédéric Demoisson
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Materials science ,Mechanical Engineering ,Nanoparticle ,Bioengineering ,Nanotechnology ,02 engineering and technology ,General Chemistry ,Nanoflower ,010402 general chemistry ,021001 nanoscience & nanotechnology ,01 natural sciences ,0104 chemical sciences ,Colloid ,chemistry.chemical_compound ,chemistry ,Mechanics of Materials ,Hydrothermal synthesis ,Surface modification ,General Materials Science ,Crystallite ,Electrical and Electronic Engineering ,0210 nano-technology ,Nuclear chemistry ,Superparamagnetism ,Magnetite - Abstract
For the first time, functionalized magnetite nanoparticles (Fe3O4 NPs) that form aggregates with a nanoflower morphology were synthesized using a rapid (11 s) one-step continuous hydrothermal process, which was recently modified, and their application as a T 2 magnetic resonance imaging (MRI) contrast agent was evaluated. The nanoparticles functionalized with 3,4-dihydroxy-L-phenylalanine (LDOPA) or 3,4-dihydroxyhydrocinnamic acid (DHCA) consisted of small crystallites of approximately 15 nm of diameter that assembled to form flower-shaped aggregate structures. The Fe3O4-LDOPA nanoflowers exhibited a high transverse relaxivity, r 2 of 418 ± 10 l mmolFe (-1) s(-1) at 3 T owing to magnetic dipolar interactions, which is twice as that of the commercial Feridex®/Endorem®. The prepared nanostructures were compared with bare Fe3O4 NPs and citrated Fe3O4 NPs. DHCA, LDOPA, and citric acid (CA) were found to have an anti-oxidizing effect and to influence the crystallite size and the lattice parameter of the NPs. DHCA and LDOPA increased the crystallite size, whereas CA decreased it. Surface modification increased the colloidal stability of NPs as compared to bare NPs. Nanoflower suspensions of Fe3O4-LDOPA NPs were found to be stable in the phosphate-buffered saline, saline medium, and minimal essential medium and formed aggregates of sizes smaller than 120 nm. All samples were found to be superparamagnetic in nature and the highest saturation magnetization was obtained for the Fe3O4-LDOPA samples. These NPs can bind to polymers such as PEG, and to fluorescent and chelating agents owing to the presence of free -NH2 or -COOH groups on the surface of NPs, allowing their use in dual imaging applications.
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- 2016
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