1. Spatially resolved measurements of absolute CH3 concentration in a hot-filament reactor
- Author
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Y. Ma, Richard N. Zare, Thomas Owano, P. Zalicki, Charles H. Kruger, and E.H. Wahl
- Subjects
Chemistry ,Mechanical Engineering ,Radical ,Diffusion ,Absorption cross section ,Analytical chemistry ,Diamond ,Methyl radical ,General Chemistry ,engineering.material ,Electronic, Optical and Magnetic Materials ,Protein filament ,chemistry.chemical_compound ,Materials Chemistry ,engineering ,Electrical and Electronic Engineering ,Spectroscopy ,Absorption (electromagnetic radiation) - Abstract
Methyl radicals are generated in a hot-filament diamond synthesis reactor using a resistively heated tungsten filament (20 mm long) in a slowly flowing mixture of 0.5% CH 4 in H 2 . The UV absorbance of CH 3 is measured during deposition using a line-of-sight optical technique called cavity ring-down spectroscopy (CRDS). Measurements are carried out at 213.9 nm, a wavelength at which the CH 3 absorption cross section has been shown, by others, to be independent of temperature over a large range. We observe a strong sensitivity of the methyl radical concentration throughout the reactor to the substrate temperature. At some operating conditions, we also observe the methyl radical concentration to peak at a location several millimeters from the filament surface. This behavior of CH 3 with distance from filament is in qualitative agreement with two-dimensional models of the deposition environment, and is attributed to the effect of Soret diffusion on the balance of the primary methyl production/destruction reaction. more...
- Published
- 1997
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