1. Substrate effects on the oxygen gas sensing properties of SnO 2 /TiO 2 thin films
- Author
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Hsiao-Ching Lee and Weng-Sing Hwang
- Subjects
Materials science ,Scanning electron microscope ,Analytical chemistry ,General Physics and Astronomy ,chemistry.chemical_element ,Surfaces and Interfaces ,General Chemistry ,Substrate (electronics) ,Sputter deposition ,Condensed Matter Physics ,Oxygen ,Surfaces, Coatings and Films ,Carbon film ,chemistry ,Irradiation ,Thin film ,Oxygen sensor - Abstract
In this study, SnO 2 /TiO 2 thin films are fabricated on SiO 2 /Si and Corning glass 1737 substrates using a R.F. magnetron sputtering process. The gas sensing properties of these films under an oxygen atmosphere with and without UV irradiation are carefully examined. The surface structure, morphology, optical transmission characteristics, and chemical compositions of the films are analyzed by atomic force microscopy, scanning electron microscopy and PL spectrometry. It is found that the oxygen sensitivity of the films deposited on Corning glass 1737 substrates is significantly lower than that of the films grown on SiO 2 /Si substrates. Therefore, the results suggest that SiO 2 /Si is an appropriate substrate material for oxygen gas sensors fabricated using thin SnO 2 /TiO 2 films.
- Published
- 2006
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