1. Ordered arrays of embedded Ga nanoparticles on patterned silicon substrates
- Author
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M. Bollani 1, S. Bietti 2, C. FRIGERI 3, D. Chrastina 4, K. Reyes 5, P. Smereka 5, J. Mirecki-Millunchick 6, G. Vanacore 7, 9, M. Burghammer 8, A. Tagliaferri 7, S. Sanguinetti 2, Bollani, M, Bietti, S, Frigeri, C, Chrastina, D, Reyes, K, Smereka, P, Millunchick, J, Vanacore, G, Burghammer, M, Tagliaferri, A, and Sanguinetti, S
- Subjects
Fabrication ,Materials science ,MBE ,Silicon ,Physics::Optics ,chemistry.chemical_element ,Nanoparticle ,Bioengineering ,Nanotechnology ,Substrate (electronics) ,Epitaxy ,Ga nanoparticles ,EDS ,Ordered arrays ,General Materials Science ,Kinetic Monte Carlo ,patterned Si ,Electrical and Electronic Engineering ,Gallium ,Montecarlo simulations ,FIS/03 - FISICA DELLA MATERIA ,business.industry ,Mechanical Engineering ,General Chemistry ,GaAs, Molecular Beam Epitaxy, quantum nanostructures ,Semiconductor ,chemistry ,Mechanics of Materials ,business - Abstract
We fabricate site-controlled, ordered arrays of embedded Ga nanoparticles on Si, using a combination of substrate patterning and molecular-beam epitaxial growth. The fabrication process consists of two steps. Ga droplets are initially nucleated in an ordered array of inverted pyramidal pits, and then partially crystallized by exposure to an As flux, which promotes the formation of a GaAs shell that seals the Ga nanoparticle within two semiconductor layers. The nanoparticle formation process has been investigated through a combination of extensive chemical and structural characterization and theoretical kinetic Monte Carlo simulations. © 2014 IOP Publishing Ltd.
- Published
- 2014
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