1. All-Oxide Crystalline Microelectromechanical systems
- Author
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Emilio Bellingeri, Michele Biasotti, Luca Pellegrino, Antonio Sergio Siri, D. Marré, and C. Bernini
- Subjects
Microelectromechanical systems ,Cantilever ,Fabrication ,Materials science ,Chemistry(all) ,business.industry ,Oxide ,Transition metal Oxide ,Nanotechnology ,General Medicine ,Substrate (electronics) ,Bending ,Epitaxy ,Strain ,MEMS ,Strain device ,chemistry.chemical_compound ,chemistry ,Chemical Engineering(all) ,Strontium titanate ,Optoelectronics ,business - Abstract
We report the fabrication and modeling of a microelectromechanical system (MEMS) entirely made of crystalline oxides. A suspended SrTiO3 (001) microcantilever is employed as flexible substrate for the deposition of epitaxial transition-metal oxide (TMO) thin films. Tensile strain is generated at the upper surface of the SrTiO3 cantilever during its bending. Strain is thus transmitted to an overgrown TMO film by epitaxial lock with the SrTiO3 element. A strain-generator device for epitaxial TMO films is thus demonstrated and modeled by finite element methods. Evaluation of the applied strain and its distribution along microcantilevers of rectangular and triangular geometries is given.
- Published
- 2009