1. Demonstration of uniform 6x6 GaN p-i-n UV avalanche photodiode arrays
- Author
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Russell D. Dupuis, Parminder Ghuman, Marzieh Bakhtiary-Noodeh, Zhiyu Xu, Sachidananda Babu, A. Nepomuk Otte, John W. Zeller, Minkyu Cho, Theeradetch Detchprohm, Hoon Jeong, Ashok K. Sood, and Shyh-Chiang Shen
- Subjects
Materials science ,Passivation ,APDS ,business.industry ,Gallium nitride ,Avalanche photodiode ,law.invention ,chemistry.chemical_compound ,Etch pit density ,chemistry ,law ,Breakdown voltage ,Optoelectronics ,Metalorganic vapour phase epitaxy ,business ,Dark current - Abstract
Front-illuminated p-i-n GaN-based ultraviolet (UV) avalanche photodiodes (APDs) were grown by metalorganic chemical vapor deposition (MOCVD) on 25 mm dia. bulk Ammono® n-GaN substrate having a low etch pit density (EPD) less than 5 × 104 [cm-2] and processed into 6×6 APD arrays. The devices employed N-ion implantation to achieve sidewall passivation. Evaluation of these 6×6 arrays will help to confirm the uniformity of the epitaxial materials and device processing. The maximum avalanche gain reached ~ 3×105 at the breakdown (current limited). The dark current density was 10-9 A/cm2 at reverse bias up to -20 V and the APDs exhibited a reverse breakdown voltage of 81 ± 1 V for all 36 devices without any leaky devices, confirming a high uniformity of the growth and fabrication processes.
- Published
- 2021
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