1. High-temperature resistant, ordered gold nanoparticle arrays
- Author
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Thomas P. Russell, Reinald Hillebrand, Alexey P. Milenin, Sigrid Hopfe, Petra Göring, Craig J. Hawker, Martin Steinhart, Danilo Zschech, Ulrich Gösele, Roland Scholz, Stephan Senz, and Dong Ha Kim
- Subjects
Materials science ,Chemical substance ,Plasma etching ,Mechanical Engineering ,Nanoparticle ,Bioengineering ,Nanotechnology ,General Chemistry ,Nitride ,Chemical engineering ,Mechanics of Materials ,Copolymer ,General Materials Science ,Wafer ,Electrical and Electronic Engineering ,Science, technology and society ,Lithography - Abstract
Ordered gold nanoparticle arrays with high lateral density of 6.87 × 10 10 nanoparticles cm −2 ,w hichare stable up to temperatures of 600 ◦ C, were fabricated. To this end, nanoparticles formed by thermal vacuum evaporation of Au were immobilized within the pores of nanoporous silicon wafers prepared by block copolymer lithography coupled with dry plasma etching. Even after high-temperature treatment the degree of order imposed by the block copolymer template was retained. Optionally, a nanoporous silicon nitride mask can cover the nanoporous silicon.
- Published
- 2006