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This study investigates the electrical characteristics observed in n-channel and p-channel ferroelectric field effect transistor (FeFET) devices fabricated through a similar process flow with 10 nm of ferroelectric hafnium zirconium oxide (HZO) as the gate dielectric. The n-FeFETs demonstrate a faster complete polarization switching compared to the p-channel counterparts. Detailed and systematic investigations using TCAD simulations reveal the role of fixed charges and interface traps at the HZO-interfacial layer (HZO/IL) interface in modulating the subthreshold characteristics of the devices. A characteristic crossover point observed in the transfer characteristics of n-channel devices is attributed with the temporary switching between ferroelectric-based operation to charge-based operation, caused by the pinning effect due to the presence of different traps. This experimental study helps understand the role of charge trapping effects in switching characteristics of n- and p-channel ferroelectric FETs. [ABSTRACT FROM AUTHOR]

In this work, a comprehensive study of charge trapping and de-trapping dynamics is performed on n-channel ferroelectric field-effect transistors (nFeFETs) and pFeFETs. It is discovered that: 1) the degree of charge trapping depends on the substrate that nFeFETs exhibit significant electron trapping but negligible hole trapping during memory write while pFeFETs exhibit much less electron trapping but significant hole trapping when heavily stressed; 2) due to enhanced electric field in the interlayer and semiconductor, the like initial polarization states (i.e., initialized by a pulse of the same polarity as the write pulse) could exacerbate charge trapping induced by the write pulse; 3) electron trapping is fully recoverable while hole trapping shows a semi-permanent component which involves interface trap generation; and 4) less significant charge trapping in pFeFETs allows immediate read-after-write at normal operating conditions. [ABSTRACT FROM AUTHOR]