1. Liquid-crystal alignment on a-C:H films by nitrogen plasma beam scanning.
- Author
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Wu, K. Y., Chen, C.-H., Yeh, C.-M., Hwang, J., Liu, P.-C., Lee, C.-Y., Chen, C.-W., Wei, H. K., Kou, C. S., and Lee, C.-D.
- Subjects
LIQUID crystal displays ,THIN films ,ATOMIC force microscopy ,RAMAN spectroscopy ,CHEMICAL vapor deposition ,CARBON - Abstract
A plasma beam scanning treatment has been developed to modify the surface of the hydrogenated amorphous carbon (a-C:H) film on the indium tin oxide glass. The plasma beam scanning treatment makes the a-C:H film an excellent layer for liquid-crystal alignment. The qualities of a-C:H films were characterized by using atomic force microscope, micro-Raman spectroscopy, and field-emission scanning electron microscope. The ultrathin a-C:H films were deposited at 50% CH
4 /(H2 +CH4 ) gas ratio, 100 W radio-frequency power, and a gas pressure of 10 mtorr for 15 min by capacitive-coupled plasma chemical-vapor deposition method. The twist nematic cells were filled with liquid crystal (ZLI-2293) on the a-C:H film treated with different nitrogen plasma beam scanning time. The grooving mechanism is considered not responsible for the liquid-crystal (LC) alignment. Raman spectra suggest that a bond-breaking process of aromatic rings occurs in the a-C:H film. The O1s , C1s , and N1s core-level spectra support that the nitrogen plasma beam scanning treatment induces a bond-breaking process of aromatic rings to create available carbon dangling bonds for the formation of C–O bonds. The newly formed C–O bonds are “directional,” which favor the LC alignment on the a-C:H film. [ABSTRACT FROM AUTHOR]- Published
- 2005
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