1. Study of Ion Beam Shaping of an Anode-Type Ion Source Coupled with a Whenelt Mask
- Author
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Jeha Kim, Yunsung Huh, and Yunseok Hwang
- Subjects
010302 applied physics ,Materials science ,Ion beam ,business.industry ,Materials Science (miscellaneous) ,02 engineering and technology ,General Medicine ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Focused ion beam ,Ion source ,Anode ,Optics ,Physics::Plasma Physics ,0103 physical sciences ,Beam shape ,Electrical and Electronic Engineering ,Physical and Theoretical Chemistry ,0210 nano-technology ,business ,Angle of inclination - Abstract
We fabricated an anode-type ion source driven by a charge repulsion mechanism and investigated its beam shape controlled by a Whenelt mask integrated at the front face of the source. The ion beam shape was observed to vary by changing the geometry of the Whenelt mask. As the angle of inclination of ...
- Published
- 2018
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