1. A study on the elastic coefficients of setback micro-springs for a MEMS safety and arming device
- Author
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Shuangjie Liu, Yongping Hao, Yu Qin, Xiannan Zou, and Liangyu Chen
- Subjects
010302 applied physics ,Microelectromechanical systems ,Physics ,business.industry ,02 engineering and technology ,Structural engineering ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Finite element method ,Electronic, Optical and Magnetic Materials ,Setback ,Castigliano's method ,Transverse plane ,Hardware and Architecture ,0103 physical sciences ,Fracture (geology) ,Electrical and Electronic Engineering ,Deformation (engineering) ,0210 nano-technology ,business ,Transverse direction - Abstract
This paper analyzed the effects of setback micro-springs on a MEMS safety and arming (S&A) device. To make up for defects related to current methods of obtaining the elastic coefficients of micro-springs, a computational formula for the elastic coefficients of S-shaped micro-springs was developed in accordance with Castigliano’s second theorem and Hooke’s law and verified for three types of setback micro-springs with different structures through finite element simulations and a self-designed testing system for the elastic coefficients of micro-springs. The testing values and the simulation values were in good agreement with the theoretical values. The results indicate that the precise measurement and calculation of the elastic coefficients of micro-springs in the transverse, longitudinal and vertical directions can be realized with the method presented in this paper. For the S-shaped setback micro-spring, the elastic coefficient in the transverse direction is the smallest and the most prone to fracture and plastic deformation. In the design of MEMS S&A devices, priority should be given to applying the deformation of the micro-spring in the longitudinal and vertical directions.
- Published
- 2019
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