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We describe optimization of a cryogenic magnetometer that uses nonlinear kinetic inductance in superconducting nanowires as the sensitive element instead of a superconducting quantum interference device (SQUID). The circuit design consists of a loop geometry with two nanowires in parallel, serving as the inductive section of a lumped LC resonator similar to a kinetic inductance detector (KID). This device takes advantage of the multiplexing capability of the KID, allowing for a natural frequency multiplexed readout. The Kinetic Inductance Magnetometer (KIM) is biased with a DC magnetic flux through the inductive loop. A perturbing signal will cause a flux change through the loop, and thus a change in the induced current, which alters the kinetic inductance of the nanowires, causing the resonant frequency of the KIM to shift. This technology has applications in astrophysics, material science, and the medical field for readout of Metallic Magnetic Calorimeters (MMCs), axion detection, and magnetoencephalography (MEG).

Superconducting Nanowire Single Photon Detectors (SNSPDs) have demonstrated timing and efficiency properties that have placed them at the frontier in single photon sensing applications (e.g. photon counting, deep space optical communications, quantum communication, and quantum encryption). Properties such as timing jitter as low as 3 ps, dark counts under 90 counts per day, high detection efficiency ( $>90\%$ ), short dead time and sensitivity over a wide range of photon energies (UV to IR). SNSPDs have a cutoff energy where the photon does not have enough energy to trigger the detection mechanism. In this paper, we lay out the framework and experimental setup to explore a modified approach in detecting photons below the cut off energy typical in an SNSPD. Leveraging the nanowire's change in kinetic inductance from photon absorption, the resulting voltage pulse is measured through a coupled quantum-noise-limited parametric amplifier. We consider nanowires with widths less than the vortex entry limit of w $ , where $\xi$ is the coherence length, limiting the sources of noise.

I will describe our development of a four kilopixel photometric imaging camera paired with a 1.5 meter crossed Dragone telescope. The focal plane is composed of aluminum kinetic inductance detectors (KIDs) fabricated on crystalline silicon tiles. The tiles contain 960 KIDs and are approximately 100 mm x 100 mm in size. KID pairs, each sensitive to an orthogonal linear polarization, are coupled to a waveguide/feedhorn machined from aluminum. A single block, with 480 waveguides/feedhorns arranged in a hexagonal close-pack configuration, is paired with each detector tile. Initial tests with prototype KID tiles show the expected noise and optical performance. Full-scale tiles have now been fabricated with >90% yield, and are currently being characterized. The imager is intended for terrestrial applications, and an initial demonstration with the telescope is planned for early 2020. With relatively minor changes to the KID design, it could also be optimized for astronomical applications.

We develop a simple coordinate transformation that can be employed to compensate for the nonlinearity introduced by a microwave kinetic inductance detector’s (MKID) homodyne readout scheme. This coordinate system is compared to the canonically used polar coordinates and is shown to improve the performance of the filtering method often used to estimate a photon’s energy. For a detector where the coordinate nonlinearity is primarily responsible for limiting its resolving power, this technique leads to increased dynamic range, which we show by applying the transformation to data from a hafnium MKID designed to be sensitive to photons with wavelengths in the 800- to 1300-nm range. The new coordinates allow the detector to resolve photons with wavelengths down to 400 nm, raising the resolving power at that wavelength from 6.8 to 17.

Millimeter-wave imaging provides a promising option for long-range target detection through optical obscurants such as fog, which often occur in marine environments. Given this motivation, we are currently developing a 150 GHz polarization-sensitive imager using a relatively new type of superconducting pair-breaking detector, the kinetic inductance detector (KID). This imager will be paired with a 1.5 m telescope to obtain an angular resolution of 0.09° over a 3.5° field of view using 3,840 KIDs. We have fully characterized a prototype KID array, which shows excellent performance with noise strongly limited by the irreducible fluctuations from the ambient temperature background. Full-scale KID arrays are now being fabricated and characterized for a planned demonstration in a maritime environment later this year.

Self-similar antennas offer extremely broadband functionality and easily scalable designs. Self-similar designs with a four-arm layout are also suited for dual polarization through excitations of opposing arms, although there has only been limited use of them for millimeter-wave detectors. These antennas have been used for measurements of the cosmic microwave background (CMB), which encompass a wide frequency range and are now actively focusing more on polarization anisotropies. We analyze multiple planar self-similar antenna designs with simulations in high-frequency structure simulator and ongoing physical testing. They all exhibit broadband operation between 130 and 230 GHz and can couple to both linear polarizations through the previously mentioned four-arm symmetry. Simulations include each antenna design coupled to an extended hemispherical, AR-coated lenslet. From these, a basic bowtie-like arm design produced minimal polarization wobble with moderate beam efficiency, while a hybrid trapezoidal design provided high beam efficiency with small polarization wobble. Current fabrication versions of each are being tested, coupled to multichroic microwave kinetic inductance detectors. These planar self-similar antennas, when implemented in CMB and other detectors, could improve observations while simultaneously simplifying fabrication and detector layout.

We report on the development of thermal kinetic inductance detectors (TKIDs) suitable to perform X-ray spectroscopy measurements. The aim is to implement MKIDs sensors working in thermal quasi-equilibrium mode to detect X-ray photons as pure calorimeters. The thermal mode is a variation on the MKID classical way of operation that has generated interest in recent years. TKIDs can offer the MKIDs inherent multiplexibility in the frequency domain, a high spatial resolution comparable with CCDs, and an energy resolution theoretically limited only by thermodynamic fluctuations across the thermal weak links. Microresonators are built in Ti/TiN multilayer technology with the inductive part thermally coupled with a metal absorber on a suspended SiN membrane, to avoid escape of phonons from the film to the substrate. The mid-term goal is to optimize the single-pixel design in terms of superconducting critical temperatures, internal quality factors, kinetic inductance and spectral energy resolution. The final goal is to realize a demonstrator array for a next generation thousand pixels X-ray spectrometer. In this contribution, the status of the project after one year of developments is reported, with detailed reference to the microresonators design and simulations and to the fabrication process.

Over the last few years, there has been a growing interest toward the use of superconducting microwave microresonators operated in quasi-thermal equilibrium mode, especially applied to single particle detection. Indeed, previous devices designed and tested by our group with X-ray sources in the keV range evidenced that several issues arise from the attempt of detection through athermal quasiparticles produced within direct strikes of X-rays in the superconductor material of the resonator. In order to prevent issues related to quasiparticles self-recombination and to avoid exchange of athermal phonons with the substrate, our group focused on the development of thermal superconducting microresonators. In this configuration, resonators composed of multilayer films of Ti/TiN sense the temperature of an absorbing material. To maximize the thermal response, low-critical-temperature films are preferable. By lowering the critical temperature, though, the maximum probing power bearable by the resonators decreases abruptly because of the weakening of the electron–phonon coupling. A proper compromise between the value of critical temperature (and hence sensitivity to energy deposition) and readout power bearable by the device has to be found in order to avoid signal-to-noise ratio degradation. In this contribution, we report the latest measurement of the electron–phonon coupling.

Kinetic inductance in thin film superconductors has been used as the basis for low-temperature, low-noise photon detectors. In particular thin films such as NbTiN, TiN, NbN, the kinetic inductance effect is strongly non-linear in the applied current, which can be utilized to realize novel devices. We present results from transmission lines made with these materials, where DC (current) control is used to modulate the phase velocity thereby enabling an on-chip spectrometer. The utility of such compact spectrometers are discussed, along with their natural connection with parametric amplifiers.

The energy resolution of a single photon counting Microwave Kinetic Inductance Detector (MKID) can be degraded by noise coming from the primary low temperature amplifier in the detector's readout system. Until recently, quantum limited amplifiers have been incompatible with these detectors due to dynamic range, power, and bandwidth constraints. However, we show that a kinetic inductance based traveling wave parametric amplifier can be used for this application and reaches the quantum limit. The total system noise for this readout scheme was equal to ~2.1 in units of quanta. For incident photons in the 800 to 1300 nm range, the amplifier increased the average resolving power of the detector from ~6.7 to 9.3 at which point the resolution becomes limited by noise on the pulse height of the signal. Noise measurements suggest that a resolving power of up to 25 is possible if redesigned detectors can remove this additional noise source.

Superconducting microwave microresonators are low temperature detectors (LTDs) suitable for large-scale frequency domain multiplexing readout. A promising approach consists in operating the resonators in quasi-thermal equilibrium mode: the resonator acts as a thermometer sensing the temperature rise of an absorbing material caused by an energy release. Our aim is to develop such detectors to perform spectroscopy in the keV range, with a possible future application to a next generation experiment aimed at directly measuring the neutrino mass . Still, the best configuration in terms of detector design and material must be found. Resonators made of several Ti/TiN multilayer films, which is a high kinetic inductance superconducting material previously developed by our group, were recently produced. The resonators are deposited onto a silicon slab and the sensitive area, thermally coupled to a gold absorber, is kept suspended by means of a SiN x membrane. In this way we plan to exploit the excellent energy resolution of LTDs combined with the simple multiplexing scheme of the resonators. In this contribution we present the devices along with our project, with its status and perspectives.

Arrays of tens of thousands of sensitive far-infrared detectors coupled to a cryogenic 4–6 m class orbital telescope are needed to trace the assembly of galaxies over cosmic time. The sensitivity of a 4 Kelvin telescope observing in the far-infrared (30–300 $$\upmu $$ m) would be limited by zodiacal light and Galactic interstellar dust emission, and require broadband detector noise equivalent powers (NEPs) in the range of 3 $$\times 10^{-19}$$ W/ $$\sqrt{\mathrm{Hz}}$$ . We are fabricating and testing 96 element arrays of lumped-element kinetic inductance detectors (LEKIDs) designed to reach NEPs near this level in a low-background laboratory environment. The LEKIDs are fabricated with aluminum: the low normal-state resistivity of Al permits the use of very thin wire-grid absorber lines (150 nm) for efficient absorption of radiation, while the small volumes enable high sensitivities because quasiparticle densities are high. Such narrow absorption lines present a fabrication challenge, but we deposit TiN atop the Al to increase the robustness of the detectors and achieve a 95 $$\%$$ yield. We present the design of these Al/TiN bilayer LEKIDs and preliminary sensitivity measurements at 350 $$\upmu $$ m optically loaded by cold blackbody radiation.

Future generations of far-infrared (FIR) telescopes will need detectors with noise-equivalent powers on the order of 5 x 10^(-20) W/Hz^(1/2) in order to be photon background limited by astrophysical sources. One such mission concept in development is the Galaxy Evolution Probe (GEP), which will characterize galaxy formation and evolution from z=0 to beyond z=4. Kinetic inductance detectors (KIDs) have been baselined for the GEP for spectroscopy and imaging science between 10 μm and 400 μm due to their intrinsic frequency multiplexability and simple readout schemes. We focus on quasiparticle recombination times as a strategy for increasing detector responsivities to move towards the NEP requirements of the GEP. We present a new model for quantifying time constants from the responses of detectors to pulses of light, and test this model on a 40 nm thick ¼ λ Al coplanar waveguide KID. We intend to use this measurement scheme to quantify the dependence of the quasiparticle recombination time on Al thickness.

Traveling-wave parametric amplifiers based on superconducting NbTiN films are being developed that provide gain over nearly an octave of bandwidth at microwave frequencies. The amplifiers are non-linear transmission lines, where the nonlinearity comes from the current dependence of the kinetic inductance. Amplification results from three and four-wave mixing processes, and phase matching over a wide frequency range is achieved by engineering the dispersion characteristics of the transmission line. Recent noise measurements over a wide frequency band demonstrate that the added noise of these amplifiers is close to one half photon, consistent with the quantum limit for a phase preserving amplifier. We will discuss applications of this class of amplifier to astronomical instruments.

We describe a novel class of devices based on the nonlinearity of the kinetic inductance of a superconducting thin film. By placing a current-dependent inductance in a microwave resonator, small currents can be measured through their effect on the resonator’s frequency. By using a high-resistivity material for the film and nanowires as kinetic inductors, we can achieve a large coefficient of nonlinearity to improve device sensitivity. We demonstrate a current sensitivity of 8pA/√Hz, making this device useful for transition-edge sensor (TES) readout and other cutting-edge applications. An advantage of these devices is their natural ability to be multiplexed in the frequency domain, enabling large detector arrays for TES-based instruments. A traveling-wave version of the device, consisting of a thin-film microwave transmission line, is also sensitive to small currents as they change the phase length of the line due to their effect on its inductance. We demonstrate a current sensitivity of 5pA/√Hz for this version of the device, making it also suitable for TES readout as well as other current-detection applications. It has the advantage of multi-GHz bandwidth and greater dynamic range, offering a different approach to the resonator version of the device.

We report on the status of an ongoing effort to develop arrays of horn-coupled, polarization-sensitive microwave kinetic inductance detectors (MKIDs) that are each sensitive to two spectral bands between 125 and 280 GHz. These multi-chroic MKID arrays are tailored for next-generation, large-detector-count experiments that are being designed to simultaneously characterize the polarization properties of both the cosmic microwave background (CMB) and Galactic dust emission. We present our device design and describe laboratory-based measurement results from two 23-element prototype arrays. From dark measurements of our first engineering array we demonstrated a multiplexing factor of 92, showed the resonators respond to bath temperature changes as expected, and found that the fabrication yield was 100%. From our first optically loaded array we found the MKIDs respond to millimeter-wave pulses, additional optical characterization measurements are ongoing. We end by discussing our plans for scaling up this technology to kilo-pixel arrays over the next two years., LTD-17 paper accepted by Journal of Low Temperature Physics

SuperSpec is an ultra-compact spectrometer-on-a-chip for mm and submm wavelength astronomy. Its very small size, wide spectral bandwidth, and highly multiplexed detector readout will enable construction of powerful multi-object spectrometers for observations of galaxies at high redshift. SuperSpec is a filter bank with planar, lithographed, superconducting transmission line resonator filters and lumped-element kinetic inductance detectors made from Titanium Nitride. We have built an 81 detector prototype that operates in the 195–310 GHz band. The prototype has a wide-band metal feed horn with a transition to microstrip that feeds the filter bank. The prototype has demonstrated optical filter bank channels with a range of resolving powers from 300 to 700, measured fractional frequency noise of 10^(−17)Hz^(−1) at 1 Hz.

SuperSpec is a novel on-chip spectrometer we are developing for (sub)millimeter wavelength astronomy. Our approach utilizes a filterbank of moderate resolution (R∼500) channels, coupled to lumped element kinetic inductance detectors (KIDs), all integrated onto a single silicon chip. The channels are half-wave resonators formed by lithographically depositing segments of superconducting transmission line, and the KIDs are titanium nitride resonators. Here we present optical measurements of a first generation prototype, operating in the 180–280 GHz frequency range. We have used a coherent source to measure the spectral profiles of 17 channels, which achieve linewidths corresponding to quality factors as high as Q__(filt)=700, consistent with the designed values plus additional dissipation characterized by Q_i≈1440. We have also used a Fourier Transform Spectrometer to characterize the spectral purity of all 72 channels on the chip, and measure typical out of band responses ∼30 dB below the peak response.

We are developing athermal-phonon mediated particle detectors that utilize microwave kinetic inductance detectors (MKIDs) as phonon sensors. MKIDs afford natural frequency domain multiplexing, which allows for massive substrates to be patterned with hundreds of sensors while keeping readout complexity to a minimum. Previously, our 2 cm $$\times $$ 2 cm $$\times $$ 1 mm proof-of-principle device utilized 20 MKIDs and, from the magnitude and timing of their response, we were able to reconstruct the position of a particle interaction to $$

To characterize further the cosmic star formation history at high redshifts, a large-area survey by a cryogenic 4-6 meter class telescope with a focal plane populated by tens of thousands of far-infrared (FIR, 30-300 μm) detectors with broadband detector noise equivalent powers (NEPs) on the order of 3×10^(-9) W/√ Hz is needed. Ideal detectors for such a surveyor do not yet exist. As a demonstration of one technique for approaching the ultra-low NEPs required by this surveyor, we present the design of an array of 96 350 µm KIDs that utilize phonon recycling to boost responsivity. Our KID array is fabricated with TiN deposited on a silicon-on-insulator (SOI) wafer, which is a 2 μm thick layer of silicon bonded to a thicker slab of silicon by a thin oxide layer. The backside thick slab is etched away underneath the absorbers so that the inductors are suspended on just the 2 μm membrane. The intent is that quasiparticle recombination phonons are trapped in the thin membrane, thereby increasing their likelihood of being re-absorbed by the KID to break additional Cooper pairs and boost responsivity. We also present a Monte-Carlo simulation that predicts the amount of signal boost expected from phonon recycling given different detector geometries and illumination strategies. For our current array geometry, the simulation predicts a measurable 50% boost in responsivity.

We present the design and characterization of low-volume, lumped-element aluminum kinetic inductance de- tectors for sensitive far-infrared astronomy observations. The lumped-element kinetic inductance detectors are comprised of meandered inductors that serve as radiation absorbers in parallel with interdigitated capacitors, forming high quality factor resonators. Low inductor volumes lead to low noise equivalent powers by raising quasiparticles densities, and hence responsivities, with respect to larger volumes. Low volumes are achieved with thin (20 nm), narrow (150 nm) inductors. The interdigitated capacitor architecture is designed to mitigate two-level system noise by lowering electric fields in the silicon substrate. Resonance frequencies are in the range of 190 to 500 MHz, with measured internal quality factors in excess of 1 x 10 5 . In a prior incarnation, a titanium nitride layer on top of the aluminum served as a protective layer, but complicated the superconducting proper- ties. These results were reported previously. In the current incarnation, the aluminum layer is left bare with no titanium nitride over-layer. The results for these bare aluminum devices include a yield of 88%, frequency responsivity of 10 9 W -1 , and noise equivalent power of 1 x 10 -17 W Hz -1/2 for a 350μm array. There is no evidence for 1=f noise down to at least 200 mHz. The sensitivity is currently limited by white noise, very likely from stray light in the testbed; for this detector design, sensitivities limited by generation-recombination noise in a lower-background environment should be several orders of magnitude lower.

We discuss the design considerations and initial measurements from arrays of dual-polarization, lumped element kinetic inductance detectors (LEKIDs) nominally designed for cosmic microwave background (CMB) studies. The detectors are horn-coupled, and each array element contains two single-polarization LEKIDs, which are made from thin-film aluminum and optimized for a single spectral band centered on 150 GHz. We are developing two array architectures, one based on 160 micron thick silicon wafers and the other based on silicon-on-insulator (SOI) wafers with a 30 micron thick device layer. The 20-element test arrays (40 LEKIDs) are characterized with both a linearly-polarized electronic millimeter wave source and a thermal source. We present initial measurements including the noise spectra, noise-equivalent temperature, and responsivity. We discuss future testing and further design optimizations to be implemented., Comment: 7 pages, 5 figures, Proc. SPIE Astronomical Telescopes + Instrumentation 2016, Paper 9914-24

We report on the development of scalable prototype microwave kinetic inductance detector (MKID) arrays tailored for future multi-kilo-pixel experiments that are designed to simultaneously characterize the polarization properties of both the cosmic microwave background (CMB) and Galactic dust emission. These modular arrays are composed of horn-coupled, polarization-sensitive MKIDs, and each pixel has four detectors: two polarizations in two spectral bands between 125 and 280 GHz. A horn is used to feed each array element, and a planar orthomode transducer, composed of two waveguide probe pairs, separates the incoming light into two linear polarizations. Diplexers composed of resonant-stub band-pass filters separate the radiation into 125 to 170 GHz and 190 to 280 GHz pass bands. The millimeter-wave power is ultimately coupled to a hybrid co-planar waveguide microwave kinetic inductance detector using a novel, broadband circuit developed by our collaboration. Electromagnetic simulations show the expected absorption efficiency of the detector is approximately 90%. Array fabrication will begin in the summer of 2016., To appear in the Proc. SPIE

The European Research Council has recently funded HOLMES, a project with the aim of performing a calorimetric measurement of the electron neutrino mass measuring the energy released in the electron capture decay of 163Ho. The baseline for HOLMES are microcalorimeters coupled to transition edge sensors read-out with rf-SQUIDs, for microwave multiplexing purposes. A promising alternative solution is based on superconducting microwave resonators that have undergone rapid development in the last decade. These detectors, called Microwave Kinetic Inductance Detectors (MKIDs), are inherently multiplexed in the frequency domain and suitable for even larger-scale pixel arrays, with theoretical high energy resolution and fast response. The aim of our activity is to develop arrays of microresonator detectors for X-ray spectroscopy and suitable for the calorimetric measurement of the energy spectra of 163Ho. Superconductive multilayer films composed by a sequence of pure Titanium and stoichiometric TiN layers show many ideal properties for MKIDs, such as low loss, large sheet resistance, large kinetic inductance, and tunable critical temperature $$T_\mathrm{c}$$ . We developed Ti/TiN multilayer microresonators with $$T_\mathrm{c}$$ within the range from 70 mK to 4.5 K and with good uniformity. In this contribution, we present the design solutions adopted, the fabrication processes, and the characterization results.

We report on the recent progress of the Multicolor Submillimeter (kinetic) Inductance Camera, or MUSIC. MUSIC will use antenna-coupled Microwave Kinetic Inductance Detectors to observe in four colors (150 GHz, 230 GHz, 290 GHz and 350 GHz) with 2304 detectors, 576 per band, at the Caltech Submillimeter Observatory. It will deploy in 2012. Here we provide an overview of the instrument, focusing on the array design. We have also used a pathfinder demonstration instrument, DemoCam, to identify problems in advance of the deployment of MUSIC. In particular, we identified two major limiters of our sensitivity: out-of-band light directly coupling to the detectors (i.e. not through the antenna), effectively an excess load, and a large 1/f contribution from our amplifiers and electronics. We discuss the steps taken to mitigate these effects to reach background-limited performance (BLIP) in observation.

Superconducting microwave microresonators are low temperature detectors which are compatible with large-scale multiplexed frequency domain readout. We aim to adapt and further advance the technology of microresonator detectors to develop new devices applied to the problem of measuring the neutrino mass. More specifically, we aim to develop detector arrays for calorimetric measurement of the energy spectra of 163Ho EC decay (Q ∼ 2-3 keV) for a direct measurement of the neutrino mass. In order to achieve these goal, we need to find the best design and materials for the detectors. A recent advance in microwave microresonator technology was the discovery that some metal nitrides, such as TiN, possess properties consistent with very high detector sensitivity.We plan to investigate nitrides of higher-Z materials, for example TaN and HfN, that are appropriate for containing the energy of keV decay events, exploring the properties relevant to our detectors, such as quality factor, penetration depth and recombination time. © Springer Science+Business Media, LLC 2012.

We are developing athermal-phonon mediated particle detectors using microwave kinetic inductance detectors (MKIDs) as the phonon sensing elements. Since MKIDs are easily multiplexed, hundreds of sensors patterned on a single dielectric substrate can be read out simultaneously, leading to a precise, time-resolved measurement of the phonon flux at each point on the detector surface. In addition to providing a high-resolution measurement of the location of the interaction, the energy deposited by the particle can be reconstructed with an expected baseline resolution of tens of eV. The complexity of the cryogenic readout electronics is significantly reduced relative to designs based on multiplexed transition edge sensors (TES). Initial proof-of-principle devices demonstrate energy resolutions as good as 0.7 keV at 30 keV, dominated by the position dependence of the phonon signal. New designs are aimed at improving this resolution by more than an order of magnitude. Such high-resolution phonon mediated detectors would have applications including direct detection of dark matter, hard X-ray/soft gamma-ray astrophysics, neutrinoless double beta decay, and coherent neutrino-nucleus scattering.

Using a noise thermometry technique, we measured the temperature dependence of the heat capacity C(T) of suspended SixNy membranes for two different geometries from 30 mK to 300 mK. We determined a volumetric specific heat of the SixNy on the order of 10 aJ/(mum3K) at 0.1 K for both absorber geometries. This value for the specific heat is comparable to a typical metal and is more than a factor of 10 larger than typical glassy materials. This result affects the design of highly efficient optical absorbers for membrane-isolated transition-edge sensors (TESs) for the Background-Limited far-IR/Submillimeter Spectrograph (BLISS), a proposed grating spectrometer that could fly on the next generation of large, cryogenic space-borne telescopes. We show that it is possible to reduce the thermal mass of the absorber of TESs so the effective response time taue is less than 100 ms-a requirement for all the wavelength bands for BLISS.

The opacity due to water vapor in the Earth's atmosphere obscures portions of the sub-THz spectrum (mm/sub-mm wavelengths) to ground based astronomical observation. For maximum sensitivity, instruments operating at these wavelengths must be designed to have spectral responses that match the available windows in the atmospheric transmission that occur in between the strong water absorption lines. Traditionally, the spectral response of mm/sub-mm instruments has been set using optical, metal-mesh bandpass filters [1]. An alternative method for defining the passbands, available when using superconducting detectors coupled with planar antennas, is to use on-chip, superconducting filters [2]. This paper presents the design and testing of superconducting, lumped element, on-chip bandpass filters (BPFs), placed inline with the microstrip connecting the antenna and the detector, covering the frequency range from 209–416 GHz. Four filters were designed with pass bands 209–274 GHz, 265–315 GHz, 335–361 GHz and 397–416 GHz corresponding to the atmospheric transmission windows. Fourier transform spectroscopy was used to verify that the spectral response of the BPFs is well predicted by the computer simulations. Two-color operation of the pixels was demonstrated by connecting two detectors to a single broadband antenna through two BPFs. Scalability of the design to multiple (four) colors is discussed.

We are pursuing the development of a phonon- and ionization-mediated WIMP dark matter detector employing microwave kinetic inductance detectors (MKIDs) in the phonon-sensing channel. Prospective advantages over existing detectors include: improved reconstruction of the phonon signal and event position; simplified readout wiring and cold electronics; and simplified and more reliable fabrication. We have modeled a simple design using available MKID sensitivity data and anticipate energy resolution as good as existing phonon-mediated detectors and improved position reconstruction. We are doing preparatory experimental work by fabricating strip absorber architectures. Measurements of diffusion length, trapping efficiency, and MKID sensitivity with these devices will enable us to design a 1 cm^2×2 mm prototype device to demonstrate phonon energy resolution and position reconstruction.

We present results from a demonstration camera using Microwave Kinetic Inductance Detectors (MKIDs) (Day et al. in Nature 425, 817-821, 2003 )a t the Cal- tech Submillimeter Observatory. The focal plane consists of 16 two-color (240 and 350 GHz) pixels. Each pixel is a phased-array of slot dipole antenna whose output power is coupled to MKIDs via in-line color-defining bandpass filters. A prototype software-defined radio system was used to read out up to four MKIDs simultane- ously. We obtained maps of Jupiter, Saturn, and G34.3 and demonstrated sensitivities of approximately 1 Jy s 1/2 and 10 Jy s 1/2 in the two bands, respectively, limited by detector noise due to a low-efficiency optical train. We anticipate that a second engi- neering run in 2008 with a 36-element, 4-color array and an optimized optical train will be background limited at 240, 270, 350, and 400 GHz. We are undertaking the construction of a full-size MKID camera with 576 four-color spatial pixels and using 2304 MKIDs readout by an expanded software-defined radio system.

We built and measured the electrical properties of membrane-isolation transition-edge sensing bolometers (TESs) suitable for background-limited far-IR/submillimeter direct-detection spectroscopy. Each TES consists of a Mo/Au bilayer patterned onto a suspended, thermally isolated absorber that is connected to the substrate through four SixNy beams deposited by low pressure chemical vapor deposition (LPCVD). We fabricated TESs with straight and meander support beams. The dimensions of the meander (straight) support beams are 700 μm (700 μm) long by 0.25 μm (0.5 μm) thick by 0.35 μm (0.5 μm) wide. We measured I–V characteristics for these TESs and determined that the thermal conductance G equals 72 fW/K (straight) and 19 fW/K (meander) for our best devices. The thermal conductance exhibits a T1/2 dependence with temperature which is evidence of effective elastic scattering of the acoustic phonon modes. The transition temperatures Tc for the same TESs are Tc=137 mK (straight) and Tc=71 mK (meander). If we assume the TESs are temperature-fluctuation noise limited, then the derived noise equivalent power (NEP) equals 1.9×10−19 W/Hz1/2 (straight) and 6.1×10−20 W/Hz1/2 (meander), using our measured values for G and Tc. The meander-beam TES has a derived NEP that is close to two orders of magnitude lower than the state-of-the-art. Finally, we measured an effective time constant τ of about 300 ms (straight) and 400 ms (meander) using electrical and optical pulses. These values for the NEP and τ for the meander-beam TES meet the requirements for the Background-Limited far-IR/Submillimeter Spectrograph (BLISS), a proposed NASA instrument.

We report progress toward large arrays of sensitive TES bolometers for submillimeter and far-infrared wavelengths with noise equivalent power (NEP) suitable for either imaging from a cooled space telescope or ground based spectroscopy. The arrays are based on a pixel design that makes use of a distributed transition edge sensor (TES) coupled to a slot antenna array. We have electrically characterized prototype detectors consisting of 256 TiN hot-electron TES microbolometers biased in parallel with T c =50 mK. The measured electron-phonon thermal conductance of prototype devices is as low as 1.1 pW/K at 50 mK corresponding to an electrical NEP of 4×10−19 W/Hz1/2. The time constant of two detectors with different geometries and transition widths was measured under a range of bias conditions. We have measured time constants ≳10−3 seconds, which is long enough for straightforward multiplexing with existing multiplexer technology.

D-Wave's quantum processors require a high-fidelity readout architecture for fast and accurate operation. The need for cold operation precludes readout methods with significant dissipation. The readout architecture must be scalable and compatible with an inherently dense qubit circuit layout. Superconducting microresonators have been successfully utilized as detection elements for a wide variety of applications, enabling superior multiplexing factors. In existing designs, resonators undergo a non-uniform shift in frequency and sensitivity with fabrication imperfections, ultimately limiting effective bandwidth utilization. We overcome this drawback by implementing independent control of both frequency and sensitivity. We describe the design of the detector and report experimental results demonstrating its resilience to fabrication tolerances.

SuperSpec is a novel on-chip spectrometer we are developing for multi-object, moderate resolution (R = 100 - 500), large bandwidth (~1.65:1) submillimeter and millimeter survey spectroscopy of high-redshift galaxies. The spectrometer employs a filter bank architecture, and consists of a series of half-wave resonators formed by lithographically-patterned superconducting transmission lines. The signal power admitted by each resonator is detected by a lumped element titanium nitride (TiN) kinetic inductance detector (KID) operating at 100-200 MHz. We have tested a new prototype device that is more sensitive than previous devices, and easier to fabricate. We present a characterization of a representative R=282 channel at f = 236 GHz, including measurements of the spectrometer detection efficiency, the detector responsivity over a large range of optical loading, and the full system optical efficiency. We outline future improvements to the current system that we expect will enable construction of a photon-noise-limited R=100 filter bank, appropriate for a line intensity mapping experiment targeting the [CII] 158 micron transition during the Epoch of Reionization, Comment: 16 pages, 10 figures, Proceedings of the SPIE Astronomical Telescopes + Instrumentation 2014 Conference, Vol 9153, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VII

We have developed antenna-coupled transition-edge sensor (TES) bolometers for a wide range of cosmic microwave background (CMB) polarimetry experiments, including BICEP2, Keck Array, and the balloon borne SPIDER. These detectors have reached maturity and this paper reports on their design principles, overall performance, and key challenges associated with design and production. Our detector arrays repeatedly produce spectral bands with 20%-30% bandwidth at 95, 150, or 220~GHz. The integrated antenna arrays synthesize symmetric co-aligned beams with controlled side-lobe levels. Cross-polarized response on boresight is typically ~0.5%, consistent with cross-talk in our multiplexed readout system. End-to-end optical efficiencies in our cameras are routinely 35% or higher, with per detector sensitivities of NET~300 uKrts. Thanks to the scalability of this design, we have deployed 2560 detectors as 1280 matched pairs in Keck Array with a combined instantaneous sensitivity of ~9 uKrts, as measured directly from CMB maps in the 2013 season. Similar arrays have recently flown in the SPIDER instrument, and development of this technology is ongoing., Comment: 16 pgs, 20 figs

We report photon-noise limited performance of horn-coupled, aluminum lumped-element kinetic inductance detectors at millimeter wavelengths. The detectors are illuminated by a millimeter-wave source that uses an active multiplier chain to produce radiation between 140 and 160 GHz. We feed the multiplier with either amplified broadband noise or a continuous-wave tone from a microwave signal generator. We demonstrate that the detector response over a 40 dB range of source power is well-described by a simple model that considers the number of quasiparticles. The detector noise-equivalent power (NEP) is dominated by photon noise when the absorbed power is greater than approximately 1 pW, which corresponds to $\mathrm{NEP} \approx 2 \times 10^{-17} \, \mathrm{W} \, \mathrm{Hz}^{-1/2}$, referenced to absorbed power. At higher source power levels we observe the relationships between noise and power expected from the photon statistics of the source signal: $\mathrm{NEP} \propto P$ for broadband (chaotic) illumination and $\mathrm{NEP} \propto P^{1/2}$ for continuous-wave (coherent) illumination., Comment: Matches published version (which is open access) and includes supplemental material

We discuss the design and measured performance of a titanium nitride (TiN) mesh absorber we are developing for controlling optical crosstalk in horn-coupled lumped-element kinetic inductance detector arrays for millimeter-wavelengths. This absorber was added to the fused silica anti-reflection coating attached to previously-characterized, 20-element prototype arrays of LEKIDs fabricated from thin-film aluminum on silicon substrates. To test the TiN crosstalk absorber, we compared the measured response and noise properties of LEKID arrays with and without the TiN mesh. For this test, the LEKIDs were illuminated with an adjustable, incoherent electronic millimeter-wave source. Our measurements show that the optical crosstalk in the LEKID array with the TiN absorber is reduced by 66\% on average, so the approach is effective and a viable candidate for future kilo-pixel arrays., Comment: 7 pages, 5 figures, accepted for publication in the Journal of Low Temperature Physics

Cryogenic detectors are extremely sensitive and have a wide variety of applications (particularly in astronomy), but are difficult to integrate into large arrays like a modern CCD (charge-coupled device) camera. As current detectors of the cosmic microwave background (CMB) already have sensitivities comparable to the noise arising from the random arrival of CMB photons, the further gains in sensitivity needed to probe the very early Universe will have to arise from large arrays. A similar situation is encountered at other wavelengths. Single-pixel X-ray detectors now have a resolving power of DeltaE5 eV for single 6-keV photons, and future X-ray astronomy missions anticipate the need for 1,000-pixel arrays. Here we report the demonstration of a superconducting detector that is easily fabricated and can readily be incorporated into such an array. Its sensitivity is already within an order of magnitude of that needed for CMB observations, and its energy resolution is similarly close to the targets required for future X-ray astronomy missions.

We built and measured radio-frequency (RF) loss tangent, tan δ, evaluation structures using float-zone quality silicon-on-insulator (SOI) wafers with 5 μm thick device layers. Superconducting Nb components were fabricated on both sides of the SOI Si device layer. Our main goals were to develop a robust fabrication for using crystalline Si (c-Si) dielectric layers with superconducting Nb components in a wafer bonding process and to confirm that tan δ with c-Si dielectric layers was reduced at RF frequencies compared to devices fabricated with amorphous dielectrics, such as SiO2 and SixNy, where tan δ ~ 10(exp -3). Our primary test structure used a Nb coplanar waveguide (CPW) readout structure capacitively coupled to LC resonators, where the capacitors were defined as parallel-plate capacitors on both sides of a c-Si device layer using a wafer bonding process with benzocyclobutene (BCB) wafer bonding adhesive. Our control experiment, to determine the intrinsic tan δ in the SOI device layer without wafer bonding, also used Nb CPW readout coupled to LC resonators; however, the parallel-plate capacitors were fabricated on both sides of the Si device layer using a deep reactive ion etch (DRIE) to access the c-Si underside through the buried oxide and handle Si layers in the SOI wafers. We found that our wafer bonded devices demonstrated F· δ = (8 +/- 2) × 10(exp -5), where F is the filling fraction of two-level states (TLS). For the control experiment, F· δ = (2.0 +/- 0.6) × 10(exp -5), and we discuss what may be degrading the performance in the wafer bonded devices as compared to the control devices.

We describe the Short Wavelength Camera (SWCam) for the CCAT observatory including the primary science drivers, the coupling of the science drivers to the instrument requirements, the resulting implementation of the design, and its performance expectations at first light. CCAT is a 25 m submillimeter telescope planned to operate at 5600 meters, near the summit of Cerro Chajnantor in the Atacama Desert in northern Chile. CCAT is designed to give a total wave front error of 12.5 μm rms, so that combined with its high and exceptionally dry site, the facility will provide unsurpassed point source sensitivity deep into the short submillimeter bands to wavelengths as short as the 200 μm telluric window. The SWCam system consists of 7 sub-cameras that address 4 different telluric windows: 4 subcameras at 350 μm, 1 at 450 μm, 1 at 850 μm, and 1 at 2 mm wavelength. Each sub-camera has a 6’ diameter field of view, so that the total instantaneous field of view for SWCam is equivalent to a 16’ diameter circle. Each focal plane is populated with near unit filling factor arrays of Lumped Element Kinetic Inductance Detectors (LEKIDs) with pixels scaled to subtend an solid angle of (λ/D)2 on the sky. The total pixel count is 57,160. We expect background limited performance at each wavelength, and to be able to map < 35(°)2 of sky to 5 σ on the confusion noise at each wavelength per year with this first light instrument. Our primary science goal is to resolve the Cosmic Far-IR Background (CIRB) in our four colors so that we may explore the star and galaxy formation history of the Universe extending to within 500 million years of the Big Bang. CCAT's large and high-accuracy aperture, its fast slewing speed, use of instruments with large format arrays, and being located at a superb site enables mapping speeds of up to three orders of magnitude larger than contemporary or near future facilities and makes it uniquely sensitive, especially in the short submm bands.

We present the results of a feasibility study, which examined deployment of a ground-based millimeter-wave polarimeter, tailored for observing the cosmic microwave background (CMB), to Isi Station in Greenland. The instrument for this study is based on lumped-element kinetic inductance detectors (LEKIDs) and an F/2.4 catoptric, crossed-Dragone telescope with a 500 mm aperture. The telescope is mounted inside the receiver and cooled to $

We discuss the design, fabrication, and testing of prototype horn-coupled, lumped-element kinetic inductance detectors (LEKIDs) designed for cosmic microwave background (CMB) studies. The LEKIDs are made from a thin aluminum film deposited on a silicon wafer and patterned using standard photolithographic techniques at STAR Cryoelectronics, a commercial device foundry. We fabricated twenty-element arrays, optimized for a spectral band centered on 150 GHz, to test the sensitivity and yield of the devices as well as the multiplexing scheme. We characterized the detectors in two configurations. First, the detectors were tested in a dark environment with the horn apertures covered, and second, the horn apertures were pointed towards a beam-filling cryogenic blackbody load. These tests show that the multiplexing scheme is robust and scalable, the yield across multiple LEKID arrays is 91%, and the noise-equivalent temperatures (NET) for a 4 K optical load are in the range 26$\thinspace\pm6 \thinspace \mu \mbox{K} \sqrt{\mbox{s}}$.

SPIDER is a proposed balloon-borne experiment designed to search for the imprints of gravity waves on the polarization of the cosmic microwave background radiation. The required wide frequency coverage, large number of sensitive detectors, and the stringent power constraints on a balloon are made possible by antenna-coupled TES bolometers. Several prototype devices have been fabricated and optically characterized. Their spectral and angular responses agree well with the theoretical expectations.

We fabricated and measured the thermal conductance of suspended Si 3 N 4 beams via noise thermometry to determine whether membrane-isolation bolometers are capable of reaching a phonon noise equivalent power (NEP) of 4 × 10 - 20 W / Hz 1 / 2 . This sensitivity is necessary for the Background-Limited Infrared-Submillimeter Spectrograph (BLISS) proposed for the Japanese SPICA observatory, and adequate for NASA's SAFIR observatory, a 10-m, 4 K telescope to be deployed at L2. The dimensions of the longest thermal isolation beams we measured are 3 × 0.5 × 8300 μ m 3 . We also fabricated and measured the electrical properties of superconducting molybdenum/gold transition-edge sensor (TES) bolometers with isolation beams of an identical geometry. The thermal conductance ( G ) values obtained from the noise thermometry and the TES bolometer data when the transition temperature ( T c ) of the thermistor is 60 mK correspond to an NEP of 5 × 10 - 20 W / Hz 1 / 2 , making membrane-isolated TES bolometers a strong candidate for use on BLISS-SPICA and SAFIR.

Over the last several years many different types of low-temperature detectors (LTDs) have been developed that use a microwave resonant circuit as part of their readout. These devices include microwave kinetic inductance detectors (MKID), microwave SQUID readouts for transition edge sensors (TES), and NIS bolometers. Current readout techniques for these devices use analog frequency synthesizers and IQ mixers. While these components are available as microwave integrated circuits, one set is required for each resonator. We are exploring a new readout technique for this class of detectors based on a commercial-off-the-shelf technology called software defined radio (SDR). In this method a fast digital to analog (D/A) converter creates as many tones as desired in the available bandwidth. Our prototype system employs a 100 MS/s 16-bit D/A to generate an arbitrary number of tones in 50 MHz of bandwidth. This signal is then mixed up to the desired detector resonant frequency (~10 GHz), sent through the detector, then mixed back down to baseband. The baseband signal is then digitized with a series of fast analog to digital converters (80 MS/s, 14-bit). Next, a numerical mixer in a dedicated integrated circuit or FPGA mixes the resonant frequency of a specified detector to 0 Hz, and sends the complex detector output over a computer bus for processing and storage. In this paper we will report on our results in using a prototype system to readout a MKID array, including system noise performance, X-ray pulse response, and cross-talk measurements. We will also discuss how this technique can be scaled to read out many thousands of detectors.

We report on the development of Microwave Kinetic Inductance Detectors (MKIDs) coupled to planar antennas for millimeter/submillimeter wavelengths. The MKID is a relatively new type of superconducting photon detector which is applicable from millimeter-wave frequencies to X-rays. Photons are absorbed in a superconductor, producing quasiparticle excitations, which change the surface reactance (kinetic inductance) of the superconductor. The changes in kinetic inductance are monitored using microwave high-Q thin-film superconducting resonators. Because the MKID is particularly amenable to frequency-domain multiplexing, with likely detector multiplexing factors of ∼ 10 3 or more per cryogenic amplifier, these detectors are well suited for use in large arrays. We have fabricated MKIDs coupled to submillimeter slot-array antennas using microstrip lines and have detected power from a thermal radiation source. We discuss the potential of antenna-coupled MKID arrays for ground and space-based millimeter/submillimeter imaging.

In this paper we describe the progress in the development of polarization sensitive superconducting, bolometric detector arrays targeted at cosmic microwave background (CMB) studies. Our implementation takes advantage of superconducting technology to reduce the complexity of the typical CMB bolometer focal plane by incorporating as many of the required elements as necessary on the detector itself. Each pixel in the array consists of a distributed dual-polarization beam forming antenna, a band pass filter, and power splitter/combiner delivering detected power to four separate superconducting transition edge sensors. This combination of elements detects the polarization of the incoming light uniquely while eliminating a large part of the cooled mass of the focal plane including feed horns, polarizers, and band pass filters. Of course this increases the fabrication complexity of the bolometric detector itself over previous implementations. We will describe our fabrication process consisting of eight front side mask levels and one back side layer designed to produce whole wafer array tiles suitable for CMB polarimeters.