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Your search keyword '"Noritaka Mochizuki"' showing total 2 results
Start Over Author "Noritaka Mochizuki" Topic business.industry
2 results on '"Noritaka Mochizuki"'

1. Properties of MSZ Thin Films for SOFC Grown by PECVD

Author

Noritaka Mochizuki, Hideo Okayama, Akiyoshi Nagata, Tomoaki Tatsu, and Hiromu Isa

Subjects
Materials science, business.industry, Plasma-enhanced chemical vapor deposition, Optoelectronics, Electrical and Electronic Engineering, Thin film, Condensed Matter Physics, business, Surfaces, Coatings and Films
Published
1998
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2. Optical Design for Soft X-Ray Projection Lithography

Author

Noritaka Mochizuki, Yasuaki Fukuda, Yutaka Watanabe, Masahito Niibe, and Masayuki Suzuki

Subjects
Physics, Point spread function, Image formation, business.industry, Resolution (electron density), General Engineering, General Physics and Astronomy, Wavelength, Optics, Optical transfer function, Distortion, business, Projection (set theory), Lithography
Abstract

We investigated the effect of soft X-ray multilayer mirrors on the characteristics of image formation and determined that the phase shift of the X-ray on the mirror plays an important role in image formation as well as reflectivity. Under such a condition that the effect on the characteristics of image formation can be neglected, we designed an optical system that has a resolution of 0.18 µm and 0.25 µm at the wavelength of 5 nm and 13 nm, respectively, and distortion of less than 0.01 µm in a whole exposure field of 20×40 mm2. The necessary surface accuracy of mirrors and tolerance of setting mirrors are discussed.

Published
1991
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