1. A novel MEMS electromagnetic energy harvester with series coils
- Author
-
Meng Di Han, Zhong Liang Li, and Haixia Zhang
- Subjects
Microelectromechanical systems ,Materials science ,Fabrication ,business.industry ,Electrical engineering ,Computer Science::Other ,Magnet ,Optoelectronics ,business ,Energy harvesting ,Excitation ,Microfabrication ,Power density ,Voltage - Abstract
A novel MEMS electromagnetic energy harvester with series coils was designed, fabricated and tested. The magnetic properties of permanent magnets were analyzed by MAXWELL and we enhanced magnetization through magnet arrays. An integrated method to fabricate permanent magnet was applied for fabrication, this MEMS compatible fabrication processes not only increased the production efficiency but also condensed the device's volume to 2.72 mm3. The new structure with series coils improved the output voltage to 0.98 mV at resonant frequency 48 Hz and the power density can be 5.52 uW/cm3.
- Published
- 2013
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