Search

Self-assembled InAs quantum dot (QD) lasers emitting at 1.29 mum on GaAs substrates grown by metalorganic chemical vapor deposition (MOCVD) were achieved by using GaInNAs embedding layers. This emission wavelength is the longest wavelength ever reported for QD lasers grown by MOCVD

E-beam mask writer is an extremely important tool to fabricate the x-ray mask. E-beam writing process is required to have enough placement accuracy and CD controllability for 1X mask. A variable-shaped 100 kV e-beam mask writer EB-X3 has been developed for x-ray membrane mask fabrication and evaluated by using commercially available positive tone resists. We have shown that the high resolution of 50 nm L/S could be obtained for ZEP-520 resists by using the stable 100 kV EB writer. In this study we focus on the chemically amplified (CA) resists for x-ray membrane mask fabrication.

A variable-shaped electron beam (e-beam) mask writer, EB-X3 was developed for 100 nm node 1/spl times/X-ray mask fabrication. It features a stable electron column of 100 kV and the address unit of 1 nm. This paper describes delineation characteristics of the EB-X3 on X-ray membrane mask. We have evaluated image placement (IP) accuracy and e-beam proximity effects on the X-ray membrane delineated with the EB-X3. In order to achieve highly precise IP and CD accuracy, we evaluated beam drift, temperature control, mask blanks support method, resist process, and proximity effect. Precise temperature control and a three-point support pallet are keys for excellent IP. Good CD control less than 10 nm was obtained with low proximity effects with ZEP resist and normal-hexyl acetate developer. The EB-X3 was used for X-ray mask fabrication in conjunction with an X-ray stepper in exposure experiments.

Two cases of Larsen's syndrome, that we have recently experienced, were reported.Case I, a male, aged 10 years, was born via an uncomplicated delivery.Case II, a female, aged 6 years.They had prominent forehead and wide spaced eye.They had bilateral hip, knee and elbow dislocations. In addition, they had foot deformity.Radiographic studies showed abnormalities.They had extra calcaneal ossification, short metacarpals, supernumerary carpal bones and anormalous segmentation of vertebrae.

In treating cervical spondylosis, we first, chose concervative therapy such as head halter traction, cervical brace and medication.In 14 cases not improved by these conservative metods we, after determining the exact level of the spondylosis, performed the operation of “anterior cervical fusion”.One of the most important factors in performing anterior cervical fusion is to decide the correct level of the spondylosis as this procedure affects the success of the operation.It is relatively easy to decide the level if the plain-X ray shows the degeneration in only one vertebra. However, if it reveals degenerative findings in more than one, it becomes necessaary to perform further investigations such as Musle Testig, EMG, Myelography, and Discography, during operation, in addtion to the clinical neurogical examinations. We did not perform fusion of more than two intervertebral spaces.

We report the four cases of the spinal cord tumor which we have experienced recently.Case 1. female … aged fifty was a neurinoma occured in the canda equina.Case 2. female … aged thiry five was a epidermal cyst occured in the nineth thoracic vertebral region.Case 3. male … aged fifty seven intramedullary astrocytoma which occured in the region of the fourth thoracic vertebrae.Case 4. female … aged eighteen was a meningioma occured in the extradural space of the fourth and fifth thoracic vertebrae.In the case 1. 2. 4. tumors were operatively almost completely resected, but in the case 3. unable to resect. Consequently in the former, symptom (sensory and motor disturbance) has obviously improved and deminished, but in the latter not improved and deteriorated.

Primary hyperparathyroydism in childhood is a rare occurence.The present report is of a 13-year-old girl who explained of pain and varus deformity of the hip joint for 2 years.On the laboratory examinations, hypercalcemia, hypophosphatemia, hypercalciuria, hyperposphaturia and increased serum alkaline phosphatase were found.Parathyroid gland function tests were of its hyperfunction.On the radiographic examination of long bones, skull and fingers, diffuse resorption and cystic areas wewe seen. A small tumor was found at the right lower pole of the thyroid.A diagnosis of primary hyperparathyroidism was made and surgical exstirpation was performed. The histological diagnosis was a chief cell adenoma of parathyroid gland.After exstirpation, serum calcium and phosphorous concentration gradually become within normal limmits and hip pain was diminished. Lately we performed valgus osteotomy of the Femur, for its varus deformity.