Romain Bachelet, Florencio Sánchez, N. Dix, Guillaume Saint-Girons, Tingfeng Song, Ignasi Fina, Ministerio de Ciencia e Innovación (España), Consejo Superior de Investigaciones Científicas (España), Generalitat de Catalunya, Fundación BBVA, China Scholarship Council, European Commission, Agence Nationale de la Recherche (France), Centre National de la Recherche Scientifique (France), INL - Matériaux Fonctionnels et Nanostructures (INL - MFN), Institut des Nanotechnologies de Lyon (INL), Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-École Centrale de Lyon (ECL), Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), and Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)
Stabilization of the orthorhombic phase of HfO2 with La allows very high polarization and endurance. However, these properties have not been confirmed yet in films having thickness of less than 10 nm. We have grown (111)-oriented La (2 at%) doped epitaxial HfO2 films on SrTiO3(001) and Si(001) substrates, and we report on the thickness dependence of their ferroelectric properties. Films of less than 7 nm have a high remanent polarization of about 30 µC cm-2 , show slight wakeup, endurance of at least 1010 cycles and retention of more than 10 years, both latest properties measured at the same poling voltage. La-doped HfO2 films even as thin as 4.5 nm also show robust ferroelectric properties., Financial support from the Spanish Ministry of Science and Innovation, through the Severo Ochoa FUNFUTURE (CEX2019- 000917-S), MAT2017-85232-R (AEI/FEDER, EU), PID2020- 112548RB-I00 (AEI/FEDER, EU), and PID2019-107727RB-I00 (AEI/FEDER, EU) projects, from CSIC through the i-LINK (LINKA20338) program, and from Generalitat de Catalunya (2017 SGR 1377) is acknowledged. Project supported by a 2020 Leonardo Grant for Researchers and Cultural Creators, BBVA Foundation. IF acknowledges Ramón y Cajal contract RYC-2017- 22531. TS is financially supported by China Scholarship Council (CSC), grant No. 201807000104. TS work has been done as a part of his Ph.D. program in Materials Science at Universitat Autònoma de Barcelona. RB and GSG acknowledge the financial support from the European Commission through the project TIPS (No. H2020-ICT-02-2014-1-644453), from the French national research agency (ANR) through the projects DIAMWAFEL (No. ANR-15-CE08-0034), and MITO (No. ANR-17- CE05-0018), and from CNRS through the MITI interdisciplinary programs (project NOTE). They are also grateful to the joint laboratory INL-RIBER, P. Regreny, C. Botella and J. B. Goure for the MBE technical support on the Nanolyon technological platform.