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The rising demand for processing small charges of ASICs, FPGAs or optolectronic devices at reduced costs promotes the application of e-beam direct-write lithography. This technology requires automated tools which integrate the overall processing sequence: coating, baking, developing, wet etching, stripping and cleaning. These tools should also enable clustering with e-beam writers and dry etchers for seamless processing. The novel integrated STEAG HamaTech ModuTrack track system enables automated processing of a batch of single substrates like wafers or photomasks, while for each substrate different processing methods and sequences may be chosen. The processing modules may also be operated individually. This integrated tool concept is demonstrated referring to the recently installed 8" wafer and 6" photomask ModuTrack at ITRI (Industrial Technology Research Institute of Taiwan), where the process development for wafer e-beam direct-write (EBDW) lithography and photomask processing is ongoing. The processing modules deliver outstanding capabilities, like coating resist with 50nm thickness within a total range of 1% uniformity, and developing 45nm resist dense lines both uniform and repeatable.

Inhalt: Nach Einbringen von tiefgefrorenem (—196° C) Samen-Pellets in den Zervikalkanal von 24 Kuhen warden nur die gleichen geringgradigen submukosen, petechialen Blutungen an der Schleimhaut festgestellt wie bei 14 Kontrolltieren, die man mit Flussigsamen besamt hatte oder bei denen lediglich eine Pipette intrazervikal eingefuhrt worden war. Contents: After the introduction of deep-freeze (—196° C) semen pellets into the cervical canal of 24 cows, the same slight degree of submucous petechial bleeding of the mucous membrane was observed as in 14 control animals inseminated with liquid semen or in which only a pipette had been introduced intracervically.

The adequacy of ventilation during laparoscopic sterilization under spontaneous respiration was evaluated in a group of patients. Patients received 0.5 mg flunitrazepam and 15 mg Pentazocin and were lightly sedated and fully cooperative. Slight respiratory acidosis accompanied by a clinically insignificant diminution of pO2 was noted in tests of arterial blood gases. Respiration rate rose by 5-8 breaths/minute; heart rate sank by 8-10 beats/minute. There was no significant change in blood pressure. EKG and continuous recording of the relative breath volume and instantaneous heart rate showed that no heart rhythm anomalies present except those antedating the operation. The authors therefore conclude that local anesthesia for laparoscopic sterilization is safe and in many respects desirable. Close observation of the patien including heart and circulatory monitoring access to a vein and facilities for immediated general anesthesia are necessary to meet cardiovascular emergencies promptly.