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In this work we present a new microscope based on Nano-illumination microscopy (NIM), i.e., an innovative technique based on a 2D array of nano-Light-Emitting Diodes (LEDs) used to illuminate a sample. The key point of this method is that the pitch of the LED array fixes the spatial resolution. So, potentially, with LED pitches lower than the diffraction limit, super resolution could be achieved. While nanometer sized LEDs are not available yet, we present a prototype based on optical downscaling of a single 5µm lateral size LED. Extended Field-of-View (FOV) is obtained by mechanical movement with nanopositioners. Aspects of NIM microscopy such as its size, its flexibility in the sensing hardware or its potential for fluorescence, make it a perfect candidate to enhance emerging sensing applications in different fields, but especially life science (medical imaging, genomics, ...). We demonstrate the possibilities of the NIM technique with patterns as well as with biological samples.

The recent advances in chip-size microscopy based on optical scanning with spatially resolved nano-illumination light sources are presented. This new straightforward technique takes advantage of the currently achieved miniaturization of LEDs in fully addressable arrays. These nano-LEDs are used to scan the sample with a resolution comparable to the LED sizes, giving rise to chip-sized scanning optical microscopes without mechanical parts or optical accessories. The operation principle and the potential of this new kind of microscope are analyzed through three different implementations of decreasing LED dimensions from 20 µm down to 200 nm.

MicroLED arrays with the capability of switching each pixel separately with high frequency can serve as structured micro-illumination light engines for applications in sensing, optogenetics, microscopy and many others. We describe a scalable chip process chain for the fabrication of passive-matrix microLED arrays, which were integrated with PCB-based driving electronics. The arrays were produced by deep-etching of conventional planar LED structures on sapphire, followed by filling and planarization steps. The pixel resolution lies in the range of 254 to 2540 pixels-per-inch (ppi), the arrays consist of 32 x 32 pixels. Optical output powers up to 50 µW per pixel were measured. In comparison to CMOS-based approaches, the presented technology is a simplified strategy to produce microLED arrays with high pixel counts.

In lensless microscopy, spatial resolution is usually provided by the pixel density of current digital cameras, which are reaching a hard-to-surpass pixel size / resolution limit over 1 µm. As an alternative, the dependence of the resolving power can be moved from the detector to the light sources, offering a new kind of lensless microscopy setups. The use of continuously scaled-down Light-Emitting Diode (LED) arrays to scan the sample allows resolutions on order of the LED size, giving rise to compact and low-cost microscopes without mechanical scanners or optical accessories. In this paper, we present the operation principle of this new approach to lensless microscopy, with simulations that demonstrate the possibility to use it for super-resolution, as well as a first prototype. This proof-of-concept setup integrates an 8 × 8 array of LEDs, each 5 × 5 μm2pixel size and 10 μmpitch, and an optical detector. We characterize the system using Electron-Beam Lithography (EBL) pattern. Our prototype validates the imaging principle and opens the way to improve resolution by further miniaturizing the light sources. © 2020 Optical Society of America under the terms of theOSA Open Access Publishing Agreement

Recent research into miniaturized illumination sources has prompted the development of alternative microscopy techniques. Although they are still being explored, emerging nano-light-emitting-diode (nano-LED) technologies show promise in approaching the optical resolution limit in a more feasible manner. This work presents the exploration of their capabilities with two different prototypes. In the first version, a resolution of less than 1 µm was shown thanks to a prototype based on an optically downscaled LED using an LED scanning transmission optical microscopy (STOM) technique. This research demonstrates how this technique can be used to improve STOM images by oversampling the acquisition. The second STOM-based microscope was fabricated with a 200 nm GaN LED. This demonstrates the possibilities for the miniaturization of on-chip-based microscopes., This work was partially supported by the European Union’s Horizon 2020 research and innovation program under grant agreement No. 737089—ChipScope.

This work presents a first prototype for a new approach to microscopy: a system basing its resolving power on the light emitters instead of the sensors, without using lenses. This new approach builds on the possibility of making LEDs smaller than current technology sensors, offering a new approach to microscopy we plan on developing towards superresolution. The microscope consists on a SPAD based camera, a 8x8 LED array with 5x5 μm LEDs distributed with a pitch of 10 μm, and discrete driving electronics to control them. We present simulations of the system, as well as the first microscope prototype implementing the method, and the results obtained through it.

New nano-illumination microscopy instrumentation will be presented together with the road to overcome the diffraction limit in order to achieve super-resolution. The simplicity of this technique would make it suitable in any low-resource scenario.

This work presents a compact low-cost and straightforward shadow imaging microscopy technique based on spatially resolved nano-illumination instead of spatially resolved detection. Independently addressable nano-LEDs on a regular 2D array provide the resolution of the microscope by illuminating the sample in contact with the LED array and creating a shadow image in a photodetector located on the opposite side. The microscope prototype presented here is composed by a GaN chip with an 8x8 array of 5μm-LEDs with 10 μm pitch light sources and a commercial CMOS image sensor with integrated lens used as a light collector. We describe the microscope prototype and analyze the effect of the sensing area size on image reconstruction.