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A high performance 0.15-/spl mu/m CMOS logic device has been developed with full-0.56 /spl mu/m pitch 3-level copper (Cu) interconnects. The multi-level interconnect system consists of Cu single-damascene wiring in combination with a borderless W plug at a high aspect ratio of 3.0. A two-step Cu CMP method suppresses new wiring failures which are Cu ball generated from Cu polishing dross and side wall damage. A Cu spike into the W plug is prevented by optimizing the W plug formation process. The 0.28-/spl mu/m wide Cu wiring with a borderless W plug has advantages over Al-Cu wiring for electromigration (EM) reliability. We achieve a 23% reduction of RC delay of a ring oscillator with a loaded wiring length of 1.5 mm by reducing the wiring thickness by 300 nm.

The ultimate goal of the study is the improvement of predictive methods for safety analyses and design of advanced reactors for higher efficiency and enhanced safety and for deployable reactors for electrical power generation, process heat utilization and hydrogen generation. While key applications would be advanced gas-cooled reactors (AGCRs) using the closed Brayton cycle (CBC) for higher efficiency (such as the proposed Gas Turbine - Modular Helium Reactor (GT-MHR) of General Atomics [Neylan and Simon, 1996]), results of the proposed research should also be valuable in reactor systems with supercritical flow or superheated vapors, e.g., steam. Higher efficiency leads to lower cost/kwh and reduces life-cycle impacts of radioactive waste (by reducing waters/kwh). The outcome will also be useful for some space power and propulsion concepts and for some fusion reactor concepts as side benefits, but they are not the thrusts of the investigation. The objective of the project is to provide fundamental thermal fluid physics knowledge and measurements necessary for the development of the improved methods for the applications.

This paper summarizes process, status and some examples of validation and verification (V and V) of the codes that are being used in ITER safety analyses. V and V information is provided for the codes involved in accident analyses dealing with water coolant ingress into the vacuum vessel and loss of vacuum.

Two experimental studies for the thermal-hydraulic safety of fusion reactors, ingress of the coolant events (ICE) and loss of vacuum events (LOVA), have been started as ITER safety sub-tasks for three years since February, 1995. In these researches, as for the ICE experiments, the preliminary ICE apparatus has been completed by the end of September, 1995. On the other hand, as for the LOVA experiments, the preliminary LOVA apparatus that simulated a vacuum vessel of the fusion reactor with a small-scaled model has already been constructed. The buoyancy-driven exchange flow behavior through breaches between the inside (filled with helium gas) and the outside (i.e., air) of the apparatus under the LOVA condition was investigated quantitatively. This paper summarizes the outline of the preliminary ICE and LOVA apparatuses, their experimental contents and research schedules.

In the present study, Direct Numerical Simulation (DNS) of the free-surface turbulent flow with constant temperature at the surface is performed. Numerical investigations are carried out for two Prandtl numbers 1.0 and 5.0 with the neutral or stable stratification (Ri=27.6), while a Reynolds number of 200, based on the friction velocity and flow depth. As the results, fundamental turbulent statistic data for the influence of Prandtl number change and buoyancy effect are obtained.

We have been performing PDT using Excimer Dye Laser (EDL) or YAG-OPO laser, a type of low power laser, both of which have a considerably higher degree of tissue penetration even when compared to PDT using Argon Dye Laser (ADL).PDT is a relatively simple procedure without any bleeding and does not require anesthesia since it causes no pain. PDT is performed 48 h after intravenous injection of 1.5–2.0 mg/kg of PHE (Photofrin®). Precise spot irradiation is possible using a colposcope with an optical laser path. We also use a cervical probe which enables photoirradiation of the entire cervical canal.We have performed PDT on 131 cases (95 CIS, 31 dysplasia, 1 vulval dysplasia (VIN), 3 squamous cell carcinoma, microinvasion, and 1 CIS + endocervical adenocarcinoma, microinvasion). Of these cases, 127 became CR (96.9%). The first CR case was 10 years ago and no recurrence has been observed yet.PDT is extremely effective to preserve fertility. Except for sensitive reactions to sunlight, there are no noticeable side effects or difficulties related to pregnancy or delivery. We expect that in the near future PDT will be performed using diode lasers and without hospitalization due to new photosensitizers which have shorter retention times.

The CAD/CAM system has been established mainly in the field of automotive body sheet metal engineering. The system is a combination of large host mainframes, interactive graphics, on-line plotters and NC machines. The realized CAD/CAM system fulfills the following: (1) The automotive body surfaces are defined by a complete mathematical model. Original data of the model is taken from a clay model. As the result, press tools can be made quickly and precisely using NC techniques. (2) Drawings of body sheet metal are originated on the graphics computer. This data is available to other engineers, such as structural analysts and NC part programmers. (3) In addition, this system is the best tool for helping engineers examine wiping area of windshield, movement of side glass, volume of fuel tank, validity of wiring diagram and so on. This paper covers the key elements of CAD/CAM at Nissan Motor Company.