1. Direct Growth of Hexagonal Boron Nitride on Photonic Chips for High-Throughput Characterization
- Author
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Andrey Chernev, Noah Mendelson, Martina Lihter, Evgenii Glushkov, Igor Aharonovich, Vytautas Navikas, Ritika Ritika, Reza R. Zamani, Jean Comtet, Aleksandra Radenovic, Ecole Superieure de Physique et de Chimie Industrielles de la Ville de Paris (ESPCI Paris), and Université Paris sciences et lettres (PSL)
- Subjects
Physics - Instrumentation and Detectors ,Materials science ,optically active defects ,FOS: Physical sciences ,02 engineering and technology ,Substrate (electronics) ,Chemical vapor deposition ,01 natural sciences ,Waveguide (optics) ,chemical vapor deposition ,010309 optics ,chemistry.chemical_compound ,imaging platform ,localization microscopy ,0103 physical sciences ,[PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] ,hexagonal boron nitride ,Electrical and Electronic Engineering ,Nanoscopic scale ,defects ,Condensed Matter - Materials Science ,business.industry ,2d materials ,Materials Science (cond-mat.mtrl-sci) ,Instrumentation and Detectors (physics.ins-det) ,021001 nanoscience & nanotechnology ,Chip ,[PHYS.PHYS.PHYS-GEN-PH]Physics [physics]/Physics [physics]/General Physics [physics.gen-ph] ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Characterization (materials science) ,0205 Optical Physics, 0206 Quantum Physics, 0906 Electrical and Electronic Engineering ,Silicon nitride ,chemistry ,Optoelectronics ,Photonics ,0210 nano-technology ,business ,Optics (physics.optics) ,Physics - Optics ,Biotechnology - Abstract
International audience; Adapting optical microscopy methods for nanoscale characterization of defects in two-dimensional (2D) materials is a vital step for photonic on-chip devices. To increase the analysis throughput, waveguide-based on-chip imaging platforms have been recently developed. Their inherent disadvantage, however, is the necessity to transfer the 2D material from the growth substrate to the imaging chip, which introduces nonuniform material coverage and contamination, potentially altering the characterization results. Here we present a unique approach to circumvent these shortfalls by directly growing a widely used 2D material (hexagonal boron nitride, hBN) on silicon nitride chips and optically characterizing the defects in the intact as-grown material. We compare the direct growth approach to the standard PMMA-assisted wet transfer method and confirm the clear advantages of the direct growth. While demonstrated with hBN in the current work, the method can be extended to other 2D materials.
- Published
- 2021