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The domestic development status of Inductively Coupled Plasma (ICP) simulator which is based on fluid model is explained. As each part which composes the unified simulator, electron heating module, charged and neutral particle transport module, surface reaction module including a sheath model, and GUI (Graphic User Interface) with pre- and post-processors are described in order. Also, we present data base status of chemical reaction and physical collision, which has been applied to the recently developed simulator until now. Lastly, some future plans of development are suggested.

HANBIT is a magnetic mirror confinement device. Recently, after finishing the first campaign for the basic system development, it started the second campaign for high-temperature plasma confinement physics study in a mirror configuration. Here, we introduce briefly the HANBIT device and report initial physics experiment results on RF-plasma heating and confinement in the simple mirror configuration. It appears that the discharge characteristics of HANBIT are quite different from those in other mirror devices, and an explanation is presented to clarify the difference.

A large-area transformer coupled plasma (TCP) source has been designed and constructed. In our design, a plasma generation chamber and a radio-frequency (RF) antenna chamber have been separated with a dielectric material, and differentially pumped to accommodate large-area, relatively thin dielectric windows against mechanical pressures. With a large diameter (78 cm) chamber, a low frequency (4 MHz) RF source has been chosen. By calculating the plasma impedance from TCPRP codes based on a 2D heating theory [1], the diameter of a single-turn copper coil antenna was optimized to provide high-density plasmas in the large area. Also the impedance matching circuit of this large-area TCP source has been designed from the calculated plasma impedance.

Summary form only given, as follows. A fast-scanning system with single and triple electric probes is developed to characterize a new transformer coupled plasma (TCP) source, where magnetic field trapping is applied, as a commercial etching device. Radial variation of plasma density and electron temperature are measured and dependence of these parameters on the RF power and gas pressure are analyzed along with the optimal operating conditions. Comparisons are made between data by a triple probe and those by a single probe. Non-thermal properties of TCP will be discussed.

Summary form only given, as follows. A new optical probe system which is a dual function of linear and rotating motion is developed. It consists of an optical fiber, a small achromatic bi-convex lens and an optical vacuum feedthrough. The optical configuration of the system is carefully designed to have a parallel chord along the viewing direction. The optical line emission intensity from an ICP (inductively coupled plasma) is measured in axial and radial directions. The probe is moving along the axial direction, but it also can observe the radial direction because a 45 degree inclined mirror assembly can be attached to the probe head. The spatial intensity distribution in axial direction is obtained by a direct differentiation of the line integrated intensity, and the Abel inversion method is used to get the radial intensity distribution. The results are compared with those of Langmuir probe experiment to confirm the utilization of this probe system.