1. A novel linear microprobe array for the fabrication of neural microelectrodes
- Author
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Gui Qiang, Chen Yuanfang, Chen Hongda, Zhao Shanshan, Chen SanYuan, Pei Weihua, Wang Yijun, Guo Dongmei, Zhang He, and Zhao Hui
- Subjects
Microprobe ,Materials science ,Fabrication ,Silicon ,business.industry ,General Engineering ,Analytical chemistry ,chemistry.chemical_element ,Dielectric spectroscopy ,Microelectrode ,chemistry ,Optoelectronics ,General Materials Science ,business ,Microfabrication - Abstract
A novel linear microprobe array (LMPA) has been developed by a conventional microfabrication method from silicon. The LMPA leverages the properties of conventional microwire with additional features of naturally formed regular spacing. With the help of periodic microprobe arrays and double-side V-grooves fabricated in advance between each pair of the two microprobes’ rear ends, the number of microprobe units for assembly in one array can be flexibly chosen by cleavage fracture from the LMPA. The fabrication method was demonstrated and the prototype device was assessed by electrochemical impedance spectroscopy (EIS) and in vivo test. The SNR of the spikes recorded was 6.
- Published
- 2014