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We present the detailed metrology of a superconducting Transition-Edge Sensor (TES) absorber-coupled bolometer array bonded to a variable-delay backshort to form an integral field unit. The backshort is shaped as a wedge to continuously vary the electrical phase delay of the bolometer absorber reflective termination across the array. This resonant absorber termination structure is used to define a spectral response over a 4:1 bandwidth in the far-infrared, from ∼30 to 120 μm. The metrology of the backshort-bolometer array hybrid was achieved with a laser confocal microscope and a compact cryogenic system that provides a well-defined thermal (radiative and conductive) environment for the hybrid when cooled to ∼10 K. The results show the backshort free-space delays do not change with cooling. The estimated backshort slope is 1.58 milli-radians and within 0.3% of the targeted value. The sources of error in the free-space delay of the hybrid and optical cryogenic metrology implementations are discussed in detail. We also present measurements of the bolometer's single-crystal silicon membrane topography. The membranes deform and deflect out-of-plane under both warm and cold conditions. Intriguingly, the optically active area of the membranes tends to flatten when cold and repeatably achieve the same mechanical state over many thermal cycles; hence, no evidence for thermally-induced mechanical instability is observed. Most of the cold deformation is sourced from thermally-induced stress in the metallic layers comprising the TES element of the bolometer pixels. These results provide important considerations for the design of ultra-low-noise TES bolometers. [ABSTRACT FROM AUTHOR]

The high-resolution mid-infrared spectrometer instrument will fly onboard the National Aeronautics and Space Administration’s airborne stratospheric observatory for infrared astronomy in 2019. It will provide astronomers with a unique observing window (25-122 μm) for exploring the evolution of protoplanetary disks into young solar systems. There are two focal plane detector arrays for the instrument: a high-resolution (λ/Δλ=100,000) 8×16 detector array, with a target noise-equivalent power, NEP≤3aW/Hz, and a low-resolution (λ/Δλ=600-19,000) 16×64 detector array with a target NEP≤20aW/Hz. The detectors for both of these arrays are superconducting Mo/Au bilayer transition-edge sensor bolometers on suspended single-crystal silicon membranes. We present detector characterization results for both arrays, including measurements of thermal conductance in comparison with phonon transport models, and measurements of saturation power and noise. [ABSTRACT FROM AUTHOR]