1. Large-area and double-sided pulsed laser deposition of Y-Ba-Cu-O thin films applied to HTSC microwave devices.
- Author
-
Lorenz, M., Hochmuth, H., Natusch, D., Borner, H., Tharigen, T., Patrikarakos, D.G., Frey, J., Kreher, K., Senz, S., Kastner, G., Hesse, D., Steins, M., and Schmitz, W.
- Subjects
PULSED laser deposition ,LASER deposition ,COATING processes ,BANDPASS filters ,ELECTRIC filters - Abstract
Pulsed laser deposition (PLD) of YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) thin films on both sides of 3-inch diameter sapphire wafers and LaAlO/sub 3/ (LAO) cylinder substrates, respectively, is a basic and flexible technique in order to optimize microwave bandpass filters for wireless communication systems. The large-area and double-side PLD technique allows homogeneous and reproducible YBCO deposition on both substrate sides with inductively measured critical current densities j/sub c/ of 3/spl times/10/sup 6/ to 5/spl times/10/sup 6/ A/cm/sup 2/ at 77 K with a YBCO thickness of 350 nm to 600 nm. Selected results of compositional, structural, electrical, and microwave characterization of the PLD-YBCO films are reported. [ABSTRACT FROM PUBLISHER]
- Published
- 1997
- Full Text
- View/download PDF