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Using the method proposed by Swanepoel (J Phys E: Sci Instrum 17:896–903, 1984), a-Si:H and nc-Si:H thin films have been successfully characterised using the transmission spectrum alone as taken in the UV–visible range. The studied samples were deposited on both Corning glass and Polyethylene napthalate (PEN) substrates using the Hot Wire Chemical Vapour deposition technique (HWCVD). Results on refractive index, absorption coefficient and energy gap will be presented. Thicknesses calculated by the same method will be compared to those obtained by direct measurement using a Dektak profilometer. [ABSTRACT FROM AUTHOR]

Abstract: It proves difficult to obtain a set of protocrystalline silicon materials with different characteristics from the same deposition chamber to study the exact nature of these transition region materials. Hot-wire deposited protocrystalline silicon was thus isochronically annealed at different temperatures to investigate the bonded hydrogen configurations and structural disorder. Modeling of optical reflection and transmission spectra with Scout® yielded the optical parameters and infrared spectroscopy confirms that bonded hydrogen remains in the material, with the exception of a longer anneal of six hours at 520°C. Sub bandgap absorption as inferred from photothermal deflection spectroscopy was related to these characteristics. [Copyright &y& Elsevier]