1. Angular and velocity distributions of tungsten sputtered by low energy argon ions
- Author
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K. M. Gutorov, I. Sorokin, F. Granberg, Joonas Matti Aleksi Jussila, Kai Nordlund, E. D. Marenkov, D. Borodin, A. Eksaeva, and Department of Physics
- Subjects
Nuclear and High Energy Physics ,Argon ,Materials science ,Physics::Instrumentation and Detectors ,chemistry.chemical_element ,02 engineering and technology ,Tungsten ,021001 nanoscience & nanotechnology ,114 Physical sciences ,01 natural sciences ,010305 fluids & plasmas ,Ion ,Condensed Matter::Materials Science ,Molecular dynamics ,Distribution (mathematics) ,Nuclear Energy and Engineering ,chemistry ,Physics::Plasma Physics ,Sputtering ,Orientation (geometry) ,0103 physical sciences ,Raised cosine distribution ,General Materials Science ,Atomic physics ,0210 nano-technology - Abstract
Sputtering by ions with low near-threshold energies is investigated. Experiments and simulations are conducted for tungsten sputtering by low-energy, 85-200 eV Ar atoms. The angular distributions of sputtered particles are measured. A new method for molecular dynamics simulation of sputtering taking into account random crystallographic surface orientation is developed, and applied for the case under consideration. The simulations approximate experimental results well. At low energies the distributions acquire "butterfly-like" shape with lower sputtering yields for close to normal angles comparing to the cosine distribution. The energy distributions of sputtered particles were simulated. The Thompson distribution remains valid down to near-threshold 85 eV case. (C) 2017 Elsevier B. V. All rights reserved.
- Published
- 2017
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