1. Diagnostics and modeling in a pure argon plasma: Energy balance study
- Author
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Yong-qing Li, U. M. Kelkar, L. A. Roe, and M. H. Gordon
- Subjects
Argon ,chemistry.chemical_element ,Surfaces and Interfaces ,Rate equation ,Plasma ,Condensed Matter Physics ,Boltzmann equation ,Ion source ,Surfaces, Coatings and Films ,chemistry ,Physics::Plasma Physics ,Excited state ,Heat transfer ,Plasma diagnostics ,Atomic physics - Abstract
A self-consistent pseudo-one-dimensional (zero-dimensional with diffusion) plasma model and optical emission spectroscopy are used in tandem to investigate the power coupling efficiency for a pure argon microwave plasma. The self-consistent model is developed by simultaneously solving the Boltzmann equation (for the non-Maxwellian electron energy distribution function), electron number density balance equation, energy balance equation, and the excited state rate equations in a collisional-radiative model. The absolute line emission intensity is utilized to obtain number densities of three argon excited states [4p (7147 A), 5p (4300 A), and 5d (6043 A)] in a 5 Torr, 680 W input power argon discharge. The absolute continuum emission from the plasma was utilized to determine the maximum electron number density. A comparison of the numerical and experimental data indicates that only 2%–5% (10–35 W) of the input power is deposited in the plasma. A control volume heat transfer analysis validates this claim. The...