1. Silicon Microfabricated Beam Expander.
- Author
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Othman, A., Ibrahim, M. N., Hamzah, I. H., Sulaiman, A. A., and Ain, M. F.
- Subjects
SILICON ,MICROFABRICATION ,ANISOTROPY ,CRYSTAL etching ,POTASSIUM hydroxide ,AQUEOUS solutions - Abstract
The feasibility design and development methods of silicon microfabricated beam expander are described. Silicon bulk micromachining fabrication technology is used in producing features of the structure. A high-precision complex 3-D shape of the expander can be formed by exploiting the predictable anisotropic wet etching characteristics of single-crystal silicon in aqueous Potassium-Hydroxide (KOH) solution. The beam-expander consist of two elements, a micromachined silicon reflector chamber and micro-Fresnel zone plate. The micro-Fresnel element is patterned using lithographic methods. The reflector chamber element has a depth of 40 μm, a diameter of 15 mm and gold-coated surfaces. The impact on the depth, diameter of the chamber and absorption for improved performance are discussed. [ABSTRACT FROM AUTHOR]
- Published
- 2015
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