1. Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma.
- Author
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Shu-Xia Zhao, Fei Gao, Ya-Ping Wang, You-Nian Wang, and Bogaerts, Annemie
- Subjects
PHYSIOLOGICAL effects of anions ,ANION synthesis ,INDUCTIVELY coupled plasma mass spectrometry ,MONOTONIC functions ,PLASMA chemistry - Abstract
In this paper, the negative ion behavior in a C
4 F8 inductively coupled plasma (ICP) is investigated using a hybrid model. The model predicts a non-monotonic variation of the total negative ion density with power at low pressure (10-30 mTorr), and this trend agrees well with experiments that were carried out in many fluorocarbon (fc) ICP sources, like C2 F6 , CHF3 , and C4 F8 . This behavior is explained by the availability of feedstock C4 F8 gas as a source of the negative ions, as well as by the presence of low energy electrons due to vibrational excitation at low power. The maximum of the negative ion density shifts to low power values upon decreasing pressure, because of the more pronounced depletion of C4 F8 molecules, and at high pressure (~50 mTorr), the anion density continuously increases with power, which is similar to fc CCP sources. Furthermore, the negative ion composition is identified in this paper. Our work demonstrates that for a clear understanding of the negative ion behavior in radio frequency C4 F8 plasma sources, one needs to take into account many factors, like the attachment characteristics, the anion composition, the spatial profiles, and the reactor configuration. Finally, a detailed comparison of our simulation results with experiments is conducted. [ABSTRACT FROM AUTHOR]- Published
- 2015
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