Search

Your search keyword '"Yong Kuan Liu"' showing total 1 results
Start Over Author "Yong Kuan Liu" Topic analytical chemistry
1 results on '"Yong Kuan Liu"'

1. Application of poly(methyl methacrylate) ultrathin resist supported by a flowing subphase method in electron-beam fabrication of a 4 in. high-resolution mask

Author

Li Peng, Zhongyi Zhang, Ning Gu, Xiangdong Yu, Lixing Zhao, Qinyue Hong, Haiping Zhang, Yong Kuan Liu, Zuhong Lu, Feng Qian, and Yu Wei

Subjects
Fabrication, Materials science, business.industry, General Engineering, Analytical chemistry, Poly(methyl methacrylate), chemistry.chemical_compound, Laser linewidth, Resist, chemistry, visual_art, Monolayer, visual_art.visual_art_medium, Optoelectronics, Methyl methacrylate, Thin film, business, Lithography
Abstract

A recently designed Langmuir trough using a steady-laminar flowing subphase is exploited to support polymer monolayers. The ultrathin poly(methyl methacrylate) (PMMA) films prepared by this technique have been explored as high-resolution electron beam resists. The lithographic exposure conditions of Langmuir–Blodgett PMMA films were investigated and the results of fabricating a 4 in. mask with 0.38 μm in feature linewidth and 0.5 μm in resolution were achieved by using the Jeoptic ZBA-23 electron-beam machine as the exposure tool.

Published
1997

Catalog

Books, media, physical & digital resources
See catalog results