1. Smoothing of Polycrystalline AlN Thin Films with Argon Cluster Ions.
- Author
-
Nikolaev, I. V., Korobeishchikov, N. G., Roenko, M. A., Geydt, P. V., and Strunin, V. I.
- Subjects
COMPLEX ions ,ALUMINUM nitride films ,ATOMIC force microscopy ,ARGON ,ION beams ,THIN films ,ION bombardment - Abstract
Surface modification of polycrystalline thin films of aluminum nitride using bombardment with an cluster ion beam has been investigated. The treatment has been performed using high-energy (105 eV/atom) and low-energy (10 eV/atom) argon cluster ions. High-efficiency smoothing of the nanostructured surface in a wide range of spatial frequencies ( = 0.02–128 μm
–1 ) at ultrasmall etching depth (<100 nm) is demonstrated by atomic force microscopy with the application of the power spectral density function of roughness. [ABSTRACT FROM AUTHOR]- Published
- 2021
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