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Field of generating a surface thin film is emerging broadly in sensing applications to obtain the quick and fast results by forming the high-performance sensors. Incorporation of thin film technologies in sensor development for the better sensing could be a promising way to attain the current requirements. This work predominantly delineates the fabrication of the dielectric sensor using two different sensing materials (Gold and Aluminium). Conventional photolithography was carried out using silicon as a base material and the photo mask of the dielectric sensor was designed by AutoCAD software. The physical characterization of the fabricated sensor was done by Scanning Electron Microscope, Atomic Force Microscope, High Power Microscope and 3D-nano profiler. The electrical characterization was performed using Keithley 6487 picoammeter with a linear sweep voltage of 0 to 2 V at 0.01 V step voltage. By pH scouting, I-V measurements on the bare sensor were carried out, whereby the gold electrodes conducts a least current than aluminium dielectrodes. Comparative analysis with pH scouting reveals that gold electrode is suitable under varied ionic strengths and background electrolytes, whereas aluminium electrodes were affected by the extreme acid (pH 1) and alkali (pH 12) solutions. [ABSTRACT FROM AUTHOR]

Interdigitated electrode (IDE) based electrical biosensors are promising in the medical application field. The aim of the research study is design, fabricate and characterize of low cost, high sensitive biosensor for medical applications. IDE pattern was designed using AutoCAD software with 1 μm finger gap. Fabrication process was done using conventional photolithography process and standard CMOS process. Fabricated electrode was physically characterized using SEM images, electrically validated through I-V measurements and chemically tested with different pH buffer solutions. Al IDE was well fabricated with 0.1 μm tolerance between design mask and fabricated IDEs. Electrical measurements confirmed that IDE was well fabricated without any shortage and results of similar IDE samples were confirmed that the repeatability of the device. The extremely small current variations in nano ampere range were quantitatively detected using extra small volume of 1 μl for different pH buffer solutions. It is confirmed that IDEs are sensitive in both alkali and hydroxyl ions medium. [ABSTRACT FROM AUTHOR]