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A low-temperature sealing technique for micro-fabricated alkali vapor cells for chip-scale atomic clock applications is developed and evaluated. A thin-film indium bonding technique was used for sealing the cells at temperatures of ≤140 °C. These sealing temperatures are much lower than those reported for other approaches, and make the technique highly interesting for future micro-fabricated cells, using anti-relaxation wall coatings. Optical and microwave spectroscopy performed on first indium-bonded cells without wall coatings are used to evaluate the cleanliness of the process as well as a potential leak rate of the cells. Both measurements confirm a stable pressure inside the cell and therefore an excellent hermeticity of the indium bonding. The double-resonance measurements performed over several months show an upper limit for the leak rate of 1.5 × 10-13 mbar·l/s. This is in agreement with additional leak-rate measurements using a membrane deflection method on indium-bonded test structures. [ABSTRACT FROM AUTHOR]

We report an aging study on micro-fabricated alkali vapor cells using neon as a buffer gas. An experimental atomic clock setup is used to measure the cell's intrinsic frequency, by recording the clock frequency shift at different light intensities and extrapolating to zero intensity. We find a drift of the cell's intrinsic frequency of (-5.2±0.6)×10-11/day and quantify deterministic variations in sources of clock frequency shifts due to the major physical effects to identify the most probable cause of the drift. The measured drift is one order of magnitude stronger than the total frequency variations expected from clock parameter variations and corresponds to a slow reduction of buffer gas pressure inside the cell, which is compatible with the hypothesis of loss of Ne gas from the cell due to its permeation through the cell windows. A negative drift on the intrinsic cell frequency is reproducible for another cell of the same type. Based on the Ne permeation model and the measured cell frequency drift, we determine the permeation constant of Ne through borosilicate glass as (5.7±0.7)×10-22 m² s-1 Pa-1 at 81 °C. We propose this method based on frequency metrology in an alkali vapor cell atomic clock setup based on coherent population trapping for measuring permeation constants of inert gases. [ABSTRACT FROM AUTHOR]

We present a microfabricated alkali vapor cell equipped with an anti-relaxation wall coating. The anti-relaxation coating used is octadecyltrichlorosilane and the cell was sealed by thin-film indiumbonding at a low temperature of 140 °C. The cell body is made of silicon and Pyrex and features a double-chamber design. Depolarizing properties due to liquid Rb droplets are avoided by confining the Rb droplets to one chamber only. Optical and microwave spectroscopy performed on this wallcoated cell are used to evaluate the cell's relaxation properties and a potential gas contamination. Double-resonance signals obtained from the cell show an intrinsic linewidth that is significantly lower than the linewidth that would be expected in case the cell had no wall coating but only contained a buffer-gas contamination on the level measured by optical spectroscopy. Combined with further experimental evidence this proves the presence of a working anti-relaxation wall coating in the cell. Such cells are of interest for applications in miniature atomic clocks, magnetometers, and other quantum sensors. [ABSTRACT FROM AUTHOR]