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Your search keyword '"Zinchenko, L."' showing total 1 results
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1. Topological transformation of submicron VLSIs for the double lithographic mask technology.

Author

Shakhnov, V. A., Zinchenko, L. A., and Verstov, V. A.

Subjects
*TOPOLOGICAL transformation groups, *VERY large scale circuit integration, *LITHOGRAPHY, *HIGH performance computing, *COMPUTER software development, *ALGORITHMS
Abstract

One of the main problems in the topological transformation of submicron VLSIs for the double lithographic mask technology is the decomposition of the initial topological layer into two new ones. Transformation algorithms of the VLSI topology for the double lithographic mask technology, which are oriented towards the application of high-performance computing systems, as well as the results of experimental investigations, which are performed using the developed software, are discussed. The advantages and disadvantages of the suggested approaches are discussed. [ABSTRACT FROM AUTHOR]

Published
2013
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