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This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about remarkable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functionality, customized design, and power usage. Demonstration of various devices and technologies utilized in robotics and industrial applications are illustrated in this article along with the use and the role of silicon in the development of the sensors. Some future trends and its perspectives are also discussed. [ABSTRACT FROM AUTHOR]

One of the most important missions for robots is to operate in severe environments, and these situations require robots to have ‘toughness’ which can overcome large shocks, degraded communication quality, unexpected condition, and other critical accidents. Although there are many kinds of approaches to realize tough robotic systems, developing a tough actuators is one of the key technologies for them. We focus on hydraulic actuators and attempt to develop a tough robotic actuator with greater toughness than the electromagnetic actuators used in conventional robotic systems. In general, hydraulic actuators have enough toughness for severe environments, but their controllability and lightness are insufficient for robot systems. Herein, we propose novel hydraulic actuators that realizes lightweight with a multidirectional-forging magnesium alloy and have high controllability by low friction pistons. Prototypes were developed to examine the fundamental characteristics of the actuators and compare the two approaches for the low-friction pistons: one is based on a packing mechanism using an elastic restoring pressure, and the other utilizes a fluid-bearing technology. After basic experiments, the prototype was applied to a robotic leg to verify their potential in actual robotic systems. The robotic leg successfully jumped 260 mm in height with 21 MPa. [ABSTRACT FROM AUTHOR]

Highlights: [•] We propose a new mobile pressure control with reversible chemical reactions. [•] PEMFC controls gas pressures by adjusting electric current. [•] Prototype works successfully with electrolysis/synthesis of water. [•] The prototype achieves the maximum pressure of 0.5MPaG. [Copyright &y& Elsevier]

Abstract: Pneumatic actuators have several advantages such as light weight, safety, low cost and high compliance. However, many pneumatic actuators have complicated systems that include a compressor, air tubes, and pneumatic valves with electrical wires. This research proposes a new control method for a multiplex pneumatic transmission constructed with special resonant valves and air tubes with a control system driven by air vibration in air tubes without electrical wires. The control is simplified and effective for pneumatic systems having many degrees of freedom. In this paper, the development of a primitive model of the resonant valve and a prototype valve is described. In addition, two control methods, which are a superimposing method and a time-sharing method, are shown, and the independent driving of four actuators is realized by using one of the control methods with air tubes only. [Copyright &y& Elsevier]

Abstract: In this study, a small ultrasonic motor driven under cryogenic temperature conditions has been fabricated and evaluated. Since transducer performance generally decreases at cryogenic temperatures, we designed and fabricated a bolt-clamped Langevin-type transducer for operation at cryogenic temperature. We simulated the influence of thermal stress on the transducer. The results from simulation were used to design the transducer, and it was then used to fabricate an ultrasonic motor for cryogenic temperature. The maximum diameter and the height of the motor are 30mm and 38.7mm. To enable the motor to be driven at cryogenic temperature, we evaluated the relationship between the contact pre-load and the lowest rotatable temperature. The motor''s driving performance was evaluated at both room temperature and cryogenic temperatures. In a 4.5K helium gas ambient, the rotation speed and starting torque were 133rpm and 0.03μNm when the applied voltage was 50Vp–p. [Copyright &y& Elsevier]

Current McKibben muscles are usually 10–40 mm in diameter, which makes them very stiff during contraction and difficult to deform rendering them unsuitable for dense mounting with shape adaptability in small spaces. In this research, to solve these problems, our group has developed the thinnest McKibben muscle reported until now. Bundling the muscles results in a multifilament muscle of the desired shape and flexibility. This paper reports the design of the thin McKibben muscle and the multifilament muscle and their static characteristics. In addition, we propose two theoretical models of multifilament muscles and derive their theoretical characteristics. The static characteristics of multifilament muscles with various design parameters have been evaluated through experiments and modeling. As a result, the greater contraction ratio of the multifilament muscles compared to that of the single muscle was demonstrated both theoretically and experimentally. [ABSTRACT FROM AUTHOR]

Pneumatic actuators in general require an air-compressor, valves, and pneumatic hoses. This makes them difficult to be used on mobile apparatus. To solve this problem, we previously developed a new gas source that uses the electrolysis/synthesis of water through an ion-exchange membrane. The developed gas source uses a gas/liquid reversible chemical reaction and controls the generation/absorption of gas through an electric current supplied to the membrane. In this paper, we present a control method for the energy-regeneration cycle and perform theoretical and experimental studies to verify its power consumption. This energy-regeneration control method is applied to an actuator, and it works successfully with a power consumption improvement of approximately 20% compared to that without energy-regeneration. Furthermore, we successfully develop a hose-free pneumatic rubber actuator with this control method. [ABSTRACT FROM AUTHOR]