1. A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes
- Author
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Liviu eNicu, Thierry eLeichle, Seok eKim, Bernard eLegrand, Fabrice eMathieu, Hohyun eKeum, Adhitya eBhaswara, Équipe Microsystèmes électromécaniques (LAAS-MEMS), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Illinois State University, Service Instrumentation Conception Caractérisation (LAAS-I2C), Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
- Subjects
Materials science ,Fabrication ,Silicon ,Capacitive sensing ,lcsh:Mechanical engineering and machinery ,chemistry.chemical_element ,Nanotechnology ,02 engineering and technology ,Elastomer ,01 natural sciences ,Industrial and Manufacturing Engineering ,capacitive detection ,Resonator ,Electrostatic actuation ,Etching (microfabrication) ,General Materials Science ,lcsh:TJ1-1570 ,[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics ,Mechanical Engineering ,010401 analytical chemistry ,resonators ,021001 nanoscience & nanotechnology ,0104 chemical sciences ,Computer Science Applications ,micro-masonry ,MEMS/NEMS ,chemistry ,Nano-plates ,resonator ,0210 nano-technology ,Layer (electronics) ,Biosensor - Abstract
In this work, we use the micro-masonry technique to fabricate nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. Our approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the selective etching of a sacrificial layer. Highly doped silicon plates were transfer-printed using microtip elastomeric stamps onto insulated bases displaying cavities in order to form suspended structures with airtight gaps. By post-processing adequate interconnections, the fabricated resonators were actuated and their resonant frequency measured in a fully integrated manner. The tested nanoplate devices behave as predicted by theory and offer quality factors of more than 30 in air. Because the cavities used for electrostatic actuation/sensing of the devices are tight sealed, nanoplates fabricated via micro-masonry are suitable for liquid environment operation and are thus a promising solution for biosensing applications.
- Published
- 2016
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