1. Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass
- Author
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Christopher T. Chen, Hal S. Emmer, Andrei Faraon, Yu Horie, Rebecca Saive, Harry A. Atwater, Dennis Friedrich, and Amir Arbabi
- Subjects
Fabrication ,Photoluminescence ,Materials science ,Science ,02 engineering and technology ,Substrate (electronics) ,Epitaxy ,01 natural sciences ,Article ,Solar fuels ,010309 optics ,chemistry.chemical_compound ,0103 physical sciences ,Gallium phosphide ,Metalorganic vapour phase epitaxy ,Thin film ,Multidisciplinary ,business.industry ,021001 nanoscience & nanotechnology ,Other Physical Sciences ,chemistry ,Optoelectronics ,Medicine ,Biochemistry and Cell Biology ,0210 nano-technology ,business ,Single crystal - Abstract
Due to its high refractive index and low absorption coefficient, gallium phosphide is an ideal material for photonic structures targeted at the visible wavelengths. However, these properties are only realized with high quality epitaxial growth, which limits substrate choice and thus possible photonic applications. In this work, we report the fabrication of single crystal gallium phosphide thin films on transparent glass substrates via transfer bonding. GaP thin films on Si (001) and (112) grown by MOCVD are bonded to glass, and then the growth substrate is removed with a XeF2 vapor etch. The resulting GaP films have surface roughnesses below 1 nm RMS and exhibit room temperature band edge photoluminescence. Magnesium doping yielded p-type films with a carrier density of 1.6 × 1017 cm−3 that exhibited mobilities as high as 16 cm2V−1s−1. Due to their unique optical properties, these films hold much promise for use in advanced optical devices.
- Published
- 2017
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