1. Titanium Oxide Crystallization and Interface Defect Passivation for High Performance Insulator-Protected Schottky Junction MIS Photoanodes
- Author
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Christopher E. D. Chidsey, Andrew G. Scheuermann, Olivia L. Hendricks, Kechao Tang, Paul C. McIntyre, Andrew C. Meng, and John P. Lawrence
- Subjects
Photocurrent ,Materials science ,Silicon ,Passivation ,business.industry ,Annealing (metallurgy) ,020209 energy ,Schottky barrier ,chemistry.chemical_element ,02 engineering and technology ,Dielectric ,021001 nanoscience & nanotechnology ,Titanium oxide ,Atomic layer deposition ,chemistry ,0202 electrical engineering, electronic engineering, information engineering ,Optoelectronics ,General Materials Science ,0210 nano-technology ,business - Abstract
Atomic layer deposited (ALD) TiO2 protection layers may allow for the development of both highly efficient and stable photoanodes for solar fuel synthesis; however, the very different conductivities and photovoltages reported for TiO2-protected silicon anodes prepared using similar ALD conditions indicate that mechanisms that set these key properties are, as yet, poorly understood. In this report, we study hydrogen-containing annealing treatments and find that postcatalyst-deposition anneals at intermediate temperatures reproducibly yield decreased oxide/silicon interface trap densities and high photovoltage. A previously reported insulator thickness-dependent photovoltage loss in metal-insulator-semiconductor Schottky junction photoanodes is suppressed. This occurs simultaneously with TiO2 crystallization and an increase in its dielectric constant. At small insulator thickness, a record for a Schottky junction photoanode of 623 mV photovoltage is achieved, yielding a photocurrent turn-on at 0.92 V vs NHE or -0.303 V with respect to the thermodynamic potential for water oxidation.
- Published
- 2016
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