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Start Over Author "Thomas J. Haigh" Topic 0202 electrical engineering, electronic engineering, information engineering
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1. Pinch-Off Plasma CVD Deposition Process and Material Technology for Nano-Device Air Gap/Spacer Formation

Author

Thomas J. Haigh, Kangguo Cheng, Liying Jiang, James Chingwei Li, Chanro Park, Christopher J. Penny, Don Canaperi, Son V. Nguyen, Sanjay Mehta, and Tenko Yamashita

Subjects
010302 applied physics, Materials science, Nano devices, business.industry, 020209 energy, 02 engineering and technology, Plasma, 01 natural sciences, Material technology, Electronic, Optical and Magnetic Materials, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, Pinch, Optoelectronics, business, Air gap (plumbing), Deposition process
Published
2018
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