1. Low-cost silicon neural probe: fabrication, electrochemical characterization and in vivo validation
- Author
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Nuno M. Gomes, Carina Soares-Cunha, Jose P. Pereira, João Ribeiro, Márcio R. Souto, Inês Caetano, José Higino Correia, Helena C. Fernandes, José A. Rodrigues, Sara Pimenta, João Filipe Oliveira, and Universidade do Minho
- Subjects
Saúde de qualidade ,Fabrication ,Materials science ,Passivation ,02 engineering and technology ,01 natural sciences ,PEDOT:PSS ,Etching (microfabrication) ,0103 physical sciences ,Electrical and Electronic Engineering ,Neural probe ,010302 applied physics ,Science & Technology ,business.industry ,technology, industry, and agriculture ,Engenharia Eletrotécnica, Eletrónica e Informática [Engenharia e Tecnologia] ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Electronic, Optical and Magnetic Materials ,Dielectric spectroscopy ,Microelectrode ,Hardware and Architecture ,Optoelectronics ,Wafer dicing ,0210 nano-technology ,business ,Engenharia e Tecnologia::Engenharia Eletrotécnica, Eletrónica e Informática ,Microfabrication - Abstract
This paper presents the fabrication of a silicon neural probe using low-cost microfabrication technologies, such as thin-films deposition, blade dicing, and photolithography. The metal stack that forms the 9 microelectrodes of 50 × 50 µm2 area, the tracks and the pads were made of Ti and Pt, while the passivation stack was SiO2 and Si3N4. The fabricated probe was characterized using electrochemical impedance spectroscopy, before and after deposition of poly(3,4-ethylene-dioxythiophene) (PEDOT) on Pt microelectrodes. The electrochemical deposition of PEDOT, a conductive polymer, reduced the impedance of the Pt microelectrodes. The neural probe with PEDOT was used for in vivo electrophysiological acute recordings in an adult rat. The extracellular recordings were filtered to obtain the spike and local field potential (LFP) data, using Butterworth bandpass filters of 400–6000 Hz and 0.1–300 Hz, respectively. The results obtained with the fabricated neural probe validated its functionality, comparing with the signals acquired with a commercial neural probe, and the viability of the fabrication process, which avoids high–cost and complex etching processes., s ANI supports this work through the Brain Lighting project by FEDER funds through Portugal 2020, COMPETE 2020 with the reference POCI-01-0247-FEDER-003416. This work is also supported by FCT with CMEMS-UMinho Strategic Project, reference UIDB/04436/2020, the project Infrastructures Micro&- NanoFabs@PT, reference NORTE-01-0145-FEDER-022090, POR Norte, Portugal 2020 and by the project OpticalBrain, reference PTDC/CTM-REF/28406/2017, by FEDER funds through the COM PETE 2020 - Programa Operacional Competitividade e Interna cionalizac¸a˜o (POCI). The authors acknowledge also FCT CEECIND grants, Bial Foundation Grants 207/14 and 037/18 to JO; Northern Portugal Regional Operational Programme (NORTE 2020), under the Portugal 2020 Partnership Agreement, through the European Regional Development Fund (FEDER) (NORTE-01-0145-FEDER-000013); FEDER Funds, through the Competitiveness Factors Operational Programme (COMPETE), and The National Fund, through the FCT (POCI-01-0145-FEDER-007038). The authors also thank to N. A. P. de Vasconcelos from ICVS-University of Minho for the implemen tation of the setup for the in vivo recordings.
- Published
- 2020
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