1. Non-contact precision profile measurement to rough-surface objects with optical frequency combs
- Author
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Taro Onoe, Satoru Takahashi, Hirokazu Matsumoto, and Kiyoshi Takamasu
- Subjects
Physics ,business.industry ,Applied Mathematics ,Detector ,02 engineering and technology ,Frequency standard ,021001 nanoscience & nanotechnology ,Coordinate-measuring machine ,01 natural sciences ,Measure (mathematics) ,010309 optics ,Wavelength ,Optics ,Optical frequencies ,0103 physical sciences ,Cylinder ,Radio frequency ,0210 nano-technology ,business ,Instrumentation ,Engineering (miscellaneous) - Abstract
In this research, we developed a new method for the high precision and contactless profile measurement of rough-surfaced objects using optical frequency combs. The uncertainty of the frequency beats of an optical frequency comb is very small (relative uncertainty is 10−10 in our laboratory). In addition, the wavelengths corresponding to these frequency beats are long enough to measure rough-surfaced objects. We can conduct high-precision measurement because several GHz frequency beats can be used if the capability of the detector permits. Moreover, two optical frequency combs with Rb-stabilized repetition frequencies are used for the measurement instead of an RF frequency oscillator; thus, we can avoid the cyclic error caused by the RF frequency oscillator. We measured the profile of a wood cylinder with a rough surface (diameter is approximately 113.2 mm) and compared the result with that of coordinate measuring machine (CMM).
- Published
- 2016
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