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Your search keyword '"Jennifer, Rebellato"' showing total 3 results
Start Over Author "Jennifer, Rebellato" Topic [phys.phys.phys-optics]physics [physics]/physics [physics]/optics [physics.optics]
3 results on '"Jennifer, Rebellato"'

1. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

Author

Jennifer Rebellato, Regina Soufli, Franck Delmotte, Evgueni Meltchakov, Eric M. Gullikson, Sébastien de Rossi, Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Institut d'Optique Graduate School (IOGS)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS), Centre National d'Études Spatiales [Toulouse] (CNES), Lawrence Livermore National Laboratory (LLNL), and Lawrence Berkeley National Laboratory [Berkeley] (LBNL)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, business.industry, Attosecond, Extreme ultraviolet lithography, 02 engineering and technology, 021001 nanoscience & nanotechnology, Laser, 01 natural sciences, Atomic and Molecular Physics, and Optics, law.invention, 010309 optics, Wavelength, Optics, Transmission electron microscopy, law, Extreme ultraviolet, 0103 physical sciences, Nanometre, Thin film, 0210 nano-technology, business, ComputingMilieux_MISCELLANEOUS
Abstract

In this Letter, we have developed new and highly efficient periodic multilayer mirrors Al/Sc, Al/Sc/SiC, and Mo/Al/Sc with optimized reflectance at wavelengths between 40 and 65 nm. We have reached record values in measured peak reflectance: 57.5% at 44.7 nm and 46.5% at 51 nm, with Al/Sc/SiC at near-normal incidence. Furthermore, to the best of our knowledge, we have achieved the largest reported bandwidth with Mo/Al/Sc at 57 nm and the narrowest bandwidth with Al/Sc at a 60 nm wavelength. These new and promising results demonstrate that Al/Sc-based multilayer coatings are excellent candidates for future generations of extreme ultraviolet (EUV) instruments for solar physics, EUV lasers, and attosecond science, in a wavelength range that has not been fully explored.

Published
2020
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2. Analyses of tabulated optical constants for thin films in the EUV range and application to solar physics multilayer coatings

Author

Regina Soufli, Franck Delmotte, Jennifer Rebellato, F. Auchère, Sébastien de Rossi, Xueyan Zhang, Evgueni Meltchakov, Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), Centre National d'Études Spatiales [Toulouse] (CNES), Lawrence Livermore National Laboratory (LLNL), Institut d'astrophysique spatiale (IAS), and Université Paris-Sud - Paris 11 (UP11)-Institut national des sciences de l'Univers (INSU - CNRS)-Centre National de la Recherche Scientifique (CNRS)

Subjects
Zirconium, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], Materials science, business.industry, Extreme ultraviolet lithography, chemistry.chemical_element, 02 engineering and technology, Boron carbide, 021001 nanoscience & nanotechnology, 01 natural sciences, Spectral line, 010309 optics, chemistry.chemical_compound, chemistry, Extreme ultraviolet, 0103 physical sciences, Silicon carbide, Transmittance, Optoelectronics, Thin film, [PHYS.COND]Physics [physics]/Condensed Matter [cond-mat], 0210 nano-technology, business, ComputingMilieux_MISCELLANEOUS
Abstract

The thin film optical constants are key parameters to carry out optical simulation or optimization of multilayer mirrors with high efficiency. However, for most materials, different sets of optical constants can be found in the literature especially in the EUV range, as these parameters are not as well-known in the EUV as in the visible or wavelength range. In this work, we have used several reflectance and transmittance measurements in the wavelength range from 10 nm to 60 nm. Different optical constant files have been tested and compared with the IMD simulation software. We will present some experimental spectra and theoretical simulations to highlight the existing problem on the reliability of optical constants sets and to discuss potential solutions. We focus our research on a few materials of particular interest in the EUV range such as aluminum, aluminum oxide, molybdenum, zirconium, magnesium, silicon carbide, and boron carbide. These analyses lead us to select the most reliable and accurate optical constants set, or to create the best one from the concatenation of existing data for each material of interest.

Published
2018
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3. Optimisation and temporal stability of EUV multilayer mirrors with aluminum for wavelength range from 17 to 60 nm (Oral)

Author

Evgueni Meltchakov, Sébastien de Rossi, Charles Bourassin-Bouchet, Marc Roulliay, Jennifer Rebellato, Françoise Varniere, Polkovnikov, V. N., Pestov, A., Chkhalo, N., Franck Delmotte, Laboratoire Charles Fabry / Optique XUV, Laboratoire Charles Fabry (LCF), Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS), Institute for Physics of Microstructures of the RAS, and Russian Academy of Sciences [Moscow] (RAS)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2018

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