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Pd-based membranes play a critical role in the field of hydrogen purification and small-scale hydrogen generation. The microstructure and composition of ultra-thin Pd membranes immediately determines their performance and stability, which are however complex and elusive. We applied for the first time a novel technique of environmental scanning electron microscopy (ESEM) together with EDS analysis for in-situ investigation of microstructure and composition of Pd composite membranes under gas-thermal treatment. It enables step by step analysis of the evolution process and offers more meticulous details compared to ex-situ technologies through analysis at exactly the same location of membrane samples. Here we observed the elimination of Pd crystallites as well as the homogenization/diffusion along the whole membrane surface following high T treatment under inert gas or H 2 atmosphere. Gradual evolution of microhillocks on Pd membrane surface was resulted due to α−β phase transition or exposure to either O 2 or H 2 O, which can be effectively “smoothened” out during H 2 treatment. The exposure to steam exhibited a mild oxidation effect without pinhole formations, which appears a more appropriate surface cleaning process compared to air/oxygen treatment. A significant interlayer diffusion was revealed between Pd layer and ZrO 2 /alumina substrate in H 2 /O 2 /H 2 O atmosphere. [ABSTRACT FROM AUTHOR]