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In this study, cathodic arc electron / metal ion treatment (CA-EMIT) technique was used to modify Ti surfaces in Ni cathodic arc plasma. At this novel method, AC bias was applied to the Ti substrates. In positive cycle of AC bias, the substrates were heated by electrons while nickel ions were directed toward the substrate surface in negative cycle. The surface modification processes were performed at 5 different temperatures: 1073 K (800 °C), 1273 K (1000 °C), 1373 K (1100 °C), 1473 K (1200 °C) and 1573 (1300 °C). The samples were characterized by XRD, SEM and EDS analysis. The effect of substrate temperature and cathode current were investigated on microstructure of the samples. This process provides rapid diffusion of nickel into the titanium and high diffusion depths were obtained compared to literature studies. [ABSTRACT FROM AUTHOR]