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Mixed-scale nano- and microfluidic networks were fabricated in thermoplastics using simple and robust methods that did not require the use of sophisticated equipment to produce the nanostructures. High-precision micromilling (HPMM) and photolithography were used to generate mixed-scale molding tools that were subsequently used for producing fluidic networks into thermoplastics such as poly(methyl methacrylate), PMMA, cyclic olefin copolymer, COC, and polycarbonate, PC. Nanoslit arrays were imprinted into the polymer using a nanoimprinting tool, which was composed of an optical mask with patterns that were 2–7 µm in width and a depth defined by the Cr layer (100 nm), which was deposited onto glass. The device also contained a microchannel network that was hot embossed into the polymer substrate using a metal molding tool prepared viaHPMM. The mixed-scale device could also be used as a master to produce a polymer stamp, which was made from polydimethylsiloxane, PDMS, and used to generate the mixed-scale fluidic network in a single step. Thermal fusion bonding of the cover plate to the substrate at a temperature below their respective Tgwas accomplished by oxygen plasma treatment of both the substrate and cover plate, which significantly reduced thermally induced structural deformation during assembly: ∼6% for PMMA and ∼9% for COC nanoslits. The electrokinetic transport properties of double-stranded DNA (dsDNA) through the polymeric nanoslits (PMMA and COC) were carried out. In these polymer devices, the dsDNA demonstrated a field-dependent electrophoretic mobility with intermittent transport dynamics. DNA mobilities were found to be 8.2 ± 0.7 × 10−4cm2V−1s−1and 7.6 ± 0.6 × 10−4cm2V−1s−1for PMMA and COC, respectively, at a field strength of 25 V cm−1. The extension factors for λ-DNA were 0.46 in PMMA and 0.53 in COC for the nanoslits (2–6% standard deviation). [ABSTRACT FROM AUTHOR]

Abstract  Integration of electronic wiring with microfluidic chips is an important process as it allows electrical interactions with the fluidic media, for example required for resistive and capacitive sensing. It is also necessary in order to implement various actuation and control mechanisms such as pumping, electrophoresis and temperature control. Typically electrical wire traces are added to microfabricated fluidic chips using metal deposition processes that are carried out after the fluidic chip has been fabricated. The process for adding the wiring is complicated and is limited to select metals that can be deposited by evaporation or sputtering. We present a single step method for integrating electrical wires into polymer microfluidic chips that are fabricated by a hot embossing process. This process can flexibly embed any kind of commercially available metal wire with a microfluidic chip and the wiring may be integrated to come into surface contact with the fluid or may be embedded in close proximity to (but insulated from)the fluid paths for example for local heating purposes. This method significantly reduces total processing time and is thus a valuable method for wire integration into polymer chips. We demonstrate two applications—a microelectrolysis chip and a heater chip that were fabricated using this methodology. The design, fabrication process and the initial test results are presented. [ABSTRACT FROM AUTHOR]

Abstract  In a close collaboration the team of Micromotion, micro resist technology, BESSY, and LSU-CAMD have successfully mastered the challenges of LIGA production of ultra-precision microparts for Micro Harmonic Drive® gears. The complementary expertise ranging from design and application know-how to process research and technical support resulted in high quality LIGA microparts and superior Micro Harmonic Drive® gears taking advantages of the free 2D design capability and material choice. It is also an excellent example that through contributions from partners with different background and expertise LIGA precision parts can be produced with high quality and yield and for a market competitive price. [ABSTRACT FROM AUTHOR]

Abstract  A novel fabrication method involving two-step sequential backside exposures utilizing Fraunhofer diffraction is developed in this work to overcome some of the limitations of the current micro-nozzle fabrication techniques in controlling the shape and the size of micro-nozzles. Shape and size of the fabricated micro-nozzles are compared with simulation results. Micro-nozzles with tip diameters varying from 0 to 158.1 μm and the base diameter varying from 167.2 to 360 μm are fabricated simultaneously side-by-side on the same substrate by varying the total exposure dosage from 3 to 6 J/cm2 utilizing multiple backside exposures through designed circular aperture and zone plate masks. [ABSTRACT FROM AUTHOR]

Abstract  We present on a carbon nanoparticle-filled SU-8 photosensitive polymer nanocomposite for use in microelectromechanical systems (MEMS) or microsystems. Exposure and fabrication of the material was carried out using X-ray lithography. The polymer nanocomposite was studied for its electrical, thermal and mechanical characteristics. It was found that at low filler weight percentages, the SU-8 polymer became electrically and thermally conductive. A comparative study of the lithography performance of this functionalized SU-8 to pure SU-8 was also performed. It was determined that UV lithography of the PNC was not suitable for thick films and that by using X-rays, thick film high-aspect-ratio microstructures were achievable. Such results are favorable for many applications such as monolithically integrated polymeric micro-resistive heating elements and polymeric micro-heat sinks. [ABSTRACT FROM AUTHOR]

Abstract Molding technologies associated with fabricating macro scale polymer components such as injection molding and hot embossing have been adapted with considerable success for fabrication of polymer microparts. While the basic principles of the process remain the same, the precision with which the processing parameters need to be controlled especially in the case of molding high aspect ratio (HAR) polymer microparts into polymer sheets is much greater than in the case of macro scale parts. It is seen that the bulk effects of the mold insert fixture and molding machine have a dominant influence on the molding parameters and that differences in material parameters such as the glass transition temperature (Tg) of polymer sheets are critical for the success and typically differ from sheet to sheet. This makes it very challenging to establish standard processing parameters for hot embossing of sheet polymers. In the course of this paper, a methodology for developing a hot embossing process for HAR microstructures based on known material properties and considering the cumulative behavior of mold, material, and machine will be presented. Using this method force?temperature?deflection curves were measured with the intent of fine tuning the hot embossing process. Tests were carried out for different materials using a dummy mold insert yielding information that could be directly transferred to the actual mold insert with minimum development time and no risk of damage to the actual microstructures. [ABSTRACT FROM AUTHOR]

Abstract Polymeric microfluidic chips are an enabling component for cost-effective, point of care analytical devices for pharmaceutical, agriculture, health, biological and medical applications. The microfluidic structures can be completed with active elements like pumps and valves as well as sensor components for more complex so called total analysis systems. Often, systems are designed as reader and disposable cartridge where the fluidic structures are simple devices that will be inserted into the reader, which executes the analytical protocol and displays the information in digital form, and disposed after completion of the analysis. In this paper, a hybrid fabrication approach was employed to build a polymeric microfluidic device, so-called sweatstick, suitable for collecting small, precise amounts (600??l) of human sweat, which were further analyzed for the amount of calcium ions indicating bone mass loss. The device was assembled from different parts fabricated by ultra deep X-ray lithography, precision micro-milling, and molding. Surface treatment of liquid exposed surfaces by oxygen plasma ensures hydrophilic behavior and proper capillary action. Preliminary testing of the device was performed by collecting defined amounts of sweat simulant and determining the calcium ion content using a fluorescent technique. The results for low calcium ion concentration typical for human sweat were excellent and repeatable with variation less than 5% demonstrating the ability to perform indirect bone loss measurements. [ABSTRACT FROM AUTHOR]

Abstract Gas chromatography (GC) is one of the most widespread techniques used in laboratories as a way to separate and analyze complex mixtures of volatile and semi-volatile compounds. The main advantage of miniaturization of these systems is the increased performance due to the reduced time for analysis and reduced fabrication cost of the complex pneumatic flow system. In this paper advanced design ideas and fabrication processes to facilitate integration of the sample concentrator and the column will be presented. Using the LIGA process, 0.5- and 2-m-long, 50-?m-wide, and up to 600-?m-high aspect ratio metal GC separation columns with on-chip integrated sample injection and detection were fabricated. Initial experiments of coating these high aspect ratio columns show promising results when compared to simple tubular columns. [ABSTRACT FROM AUTHOR]