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Thin oxide interlayers are commonly added to the back reflector of thin-film silicon solar cells to increase their current. To gain more insight in the enhancement mechanism, we tested different back reflector designs consisting of aluminium-doped zinc oxide (ZnO:Al) and/or hydrogenated silicon oxide (SiOx:H) interlayers with different metals (silver, aluminium, and chromium) in standard p-i-n a-Si:H solar cells. We use a unique inverse modeling approach to show that in most back reflectors the internal metal reflectance is lower than expected theoretically. However, the metal reflectance is increased by the addition of an oxide interlayer. Our experiments demonstrate that SiOx:H forms an interesting alternative interlayer because unlike the more commonly used ZnO:Al it can be deposited by plasma-enhanced chemical vapour deposition and it does not reduce the fill factor. The largest efficiency enhancement is obtained with a double interlayer of SiOx:H and ZnO:Al. [ABSTRACT FROM AUTHOR]