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Abstract  Direct-LIGA services combining X-ray based micro-fabrication and electroplating are routinely provided to customers worldwide on a “best effort” basis by several LIGA centers. In a publicly founded project in collaboration between BESSY and Ehrfeld Mikrotechnik BTS GmbH the direct-LIGA process was adapted and optimised for fabricating mixer slit plates for micro-reactors. The application of SU-8 as a resist in deep X-ray lithography opens new opportunities for a direct and cost-effective mass fabrication of LIGA metal micro-parts. This joint paper will report on efforts from BESSY, Micro Resist Technology, and Ehrfeld BTS in fabrication of mixer slit plates by direct-LIGA for use in modular micro-reaction technology. The high demands regarding precision and yield of the micro-slit plates need certain improvements in the LIGA processing chain. Our approach consists of X-ray patterned SU-8 resist molds with a layer thickness of up to 350 μm and an aspect ratio of up to 30:1. Furthermore, the pattern-transfer into the SU-8 resist was done by a low-cost X-ray mask based on a graphite membrane. Other processing steps like NiFe electroplating and SU-8 removal will be discussed in this paper. [ABSTRACT FROM AUTHOR]

Abstract  In a close collaboration the team of Micromotion, micro resist technology, BESSY, and LSU-CAMD have successfully mastered the challenges of LIGA production of ultra-precision microparts for Micro Harmonic Drive® gears. The complementary expertise ranging from design and application know-how to process research and technical support resulted in high quality LIGA microparts and superior Micro Harmonic Drive® gears taking advantages of the free 2D design capability and material choice. It is also an excellent example that through contributions from partners with different background and expertise LIGA precision parts can be produced with high quality and yield and for a market competitive price. [ABSTRACT FROM AUTHOR]