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The impurity composition of isotopically enriched germane 70GeH4 was studied for the first time by gas chromatography–mass spectrometry. Impurities were separated using capillary adsorption columns: GS-GasPro (60 m × 0.32 mm) packed with silica gel, GS-CarbonPLOT (25 m × 0.32 mm × 0.25 μm) packed with a carbon sorbent, and a column packed with poly(trimethylsilylpropyne) (25 m × 0.26 mm, df = 0.25 μm)). The use of these columns is shown to provide a high resolution of chromatographed substances. Impurities were identified by comparing their mass spectra with the data of the NIST library. Gases forming a part of the atmosphere, C1–C7 hydrocarbons, chlorine- and oxygen-containing hydrocarbons, sulfur-containing substances, and homologs and alkyl derivatives of germane were detected in germane. As a result of studying the composition of their mass spectra, the mass spectra of impurities 70GeC3H10 and 70GeC4H12, which are absent in the published sources, were obtained and described for the first time. The concentrations of impurities in high-purity germane, as well as their distribution over fractions isolated during the rectification purification of germane, were determined. The limits of detection of the identified substances were 2 ×10–7–1 × 10–4 mol %. [ABSTRACT FROM AUTHOR]