Author: "Yeom, Hee-Jung" / Search Limiters: Full Text - Searchworks@Jio Institute Digital Library Search Results

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1. Role of Oxygen in Amorphous Carbon Hard Mask Plasma Etching

Author: Yeom, Hee-Jung, primary, Yoon, Min Young, additional, Choi, Daehan, additional, Lee, Youngseok, additional, Kim, Jung-Hyung, additional, You, Shin-Jae, additional, and Lee, Hyo-Chang, additional
Published: 2023
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2. Computational Characterization of Microwave Planar Cutoff Probes for Non-Invasive Electron Density Measurement in Low-Temperature Plasma: Ring- and Bar-Type Cutoff Probes

Author: Kim, Si Jun, primary, Lee, Jang Jae, additional, Lee, Young Seok, additional, Yeom, Hee Jung, additional, Lee, Hyo Chang, additional, Kim, Jung-Hyung, additional, and You, Shin Jae, additional
Published: 2020
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