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Surface grating couplers, such as fiber-chip grating couplers and optical antennas, are fundamental devices in photonic integrated circuits, as they enable the coupling of light between the chip and an external medium. An important metric of surface grating couplers is the coupling efficiency, and high values, greater than -1 dB, are required for applications in quantum technology, light detection and ranging, and optical interconnects. Surface grating couplers typically suffer from radiation loss to the substrate, which significantly limits their coupling efficiency. Here we propose a novel grating-coupling concept that utilizes a high-refractive-index upper cladding to frustrate radiation orders to the substrate by operating in a single-beam diffraction regime. To illustrate this concept, we report the design of an easily fabricable silicon surface grating coupler with an unprecedented coupling efficiency of -0.2 dB to a single-mode optical fiber. Furthermore, the proposed strategy allows us to design an evanescently coupled millimeter-long optical antenna with a coupling efficiency of -0.1 dB to free space. Additionally, an ultra-fast wavelength-tunable beam steering of 0.37°/nm is achieved, which corresponds to more than a 2.5-fold enhancement over comparable silicon antennas. These results represent a pathway for a new set of photonic integrated interfaces for applications in which high-efficiency chip-to-fiber and chip-to-free-space coupling is critical.

Spectral filters are fundamental building blocks in integrated photonics. Bragg grating filters have been demonstrated in silicon waveguides with a wide range of spectral responses and are suitable for wavelength division multiplexing applications. However, retrieving Bragg grating reflections typically requires external components such as fiber optic circulators. In this work, we develop fully integrated add-drop filters based on cladding-modulated Bragg gratings incorporated in a Mach-Zehnder interferometer configuration. We design complex spectral filtering devices with single and dual-band flat-top responses for the specified bandwidth. Additionally, we propose a novel design methodology which aims to minimize phase errors within the filters. We experimentally demonstrate add-drop filters with single-band and two-band rejection spectra at the datacom O-band, fabricated on a 220-nm thick silicon-on-insulator platform. Our results show an insertion loss below 1 dB and a crosstalk of around -20 dB at the channel center for a 4.5-nm wavelength grid and 3-nm wide channels., (© 2024. The Author(s).)

Optical beams and starlight distorted by atmospheric turbulence can be corrected with adaptive optics systems to enable efficient coupling into single-mode fibers. Deformable mirrors, used to flatten the wavefront in astronomical telescopes, are costly, sensitive, and complex mechanical components that require careful calibration to enable high-quality imaging in astronomy, microscopy, and vision science. They are also impractical to deploy in large numbers for non-imaging applications like free-space optical communication. Here, we propose a photonic integrated circuit capable of spatially sampling the wavefront collected by the telescope and co-phasing the subapertures to maximize the flux delivered to an output single-mode fiber as the integrated photonic implementation of a deformable mirror. We present the results of end-to-end simulations to quantify the performance of the proposed photonic solution under varying atmospheric conditions toward realizing an adaptive optics system without a deformable mirror for free-space optical receivers.

Efficient fiber-chip coupling interfaces are critically important for integrated photonics. Since surface gratings diffract optical signals vertically out of the chip, these couplers can be placed anywhere in the circuit allowing for wafer-scale testing. While state-of-the-art grating couplers have been developed for silicon-on-insulator (SOI) waveguides, the moderate index contrast of silicon nitride (SiN) presents an outstanding challenge for implementing efficient surface grating couplers on this platform. Due to the reduced grating strength, a longer structure is required to radiate the light from the chip which produces a diffracted field that is too wide to couple into the fiber. In this work, we present a novel grating coupler architecture for silicon nitride photonic integrated circuits that utilizes an amorphous silicon (α-Si) overlay. The high refractive index of the α-Si overlay breaks the coupler's vertical symmetry which increases the directionality. We implement subwavelength metamaterial apodization to optimize the overlap of the diffracted field with the optical fiber Gaussian mode profile. Furthermore, the phase of the diffracted beam is engineered to focalize the field into an SMF-28 optical fiber placed 55 µm above the surface of the chip. The coupler was designed using rigorous three-dimensional (3D) finite-difference time-domain (FDTD) simulations supported by genetic algorithm optimization. Our grating coupler has a footprint of 26.8 × 32.7 µm 2 and operates in the O-band centered at 1.31 μm. It achieves a high directionality of 85% and a field overlap of 90% with a target fiber mode size of 9.2 µm at the focal plane. Our simulations predict a peak coupling efficiency of - 1.3 dB with a 1-dB bandwidth of 31 nm. The α-Si/SiN grating architecture presented in this work enables the development of compact and efficient optical interfaces for SiN integrated photonics circuits with applications including optical communications, sensing, and quantum photonics., (© 2024. The Author(s).)

Silicon nitride (Si 3 N 4 ) is an ideal candidate for the development of low-loss photonic integrated circuits. However, efficient light coupling between standard optical fibers and Si 3 N 4 chips remains a significant challenge. For vertical grating couplers, the lower index contrast yields a weak grating strength, which translates to long diffractive structures, limiting the coupling performance. In response to the rise of hybrid photonic platforms, the adoption of multi-layer grating arrangements has emerged as a promising strategy to enhance the performance of Si 3 N 4 couplers. In this work, we present the design of high-efficiency surface grating couplers for the Si 3 N 4 platform with an amorphous silicon (α-Si) overlay. The surface grating, fully formed in an α-Si waveguide layer, utilizes subwavelength grating (SWG)-engineered metamaterials, enabling simple realization through single-step patterning. This not only provides an extra degree of freedom for controlling the fiber-chip coupling but also facilitates portability to existing foundry fabrication processes. Using rigorous three-dimensional (3D) finite-difference time-domain (FDTD) simulations, a metamaterial-engineered grating coupler is designed with a coupling efficiency of -1.7 dB at an operating wavelength of 1.31 µm, with a 1 dB bandwidth of 31 nm. Our proposed design presents a novel approach to developing high-efficiency fiber-chip interfaces for the silicon nitride integration platform for a wide range of applications, including datacom and quantum photonics.

We propose the concept of a Dirac grating, where periodic permittivity perturbations approach a train of Dirac functions. We show that Dirac gratings can yield identical spectral characteristics for higher-order gratings compared to first-order gratings of the same length. Using an inverse Fourier transform technique, we design different types of Dirac gratings, including structures operating at the exceptional point where parity-time symmetry breaks down, producing unidirectional reflectance. We employ analytical and numerical techniques to validate our theory by modelling practical examples of Dirac gratings implemented in dielectric stacks and silicon nanophotonic waveguides.

We investigate and experimentally demonstrate a cladding modulated Bragg grating superstructure as a dynamically tunable and reconfigurable multi-wavelength notch filter. A non-uniform heater element was implemented to periodically modulate the effective index of the grating. The Bragg grating bandwidth is controlled by judiciously positioning loading segments away from the waveguide core, resulting in a formation of periodically spaced reflection sidebands. The thermal modulation of a periodically configured heater elements modifies the waveguide effective index, where an applied current controls the number and intensity of the secondary peaks. The device was designed to operate in TM polarization near the central wavelength of 1550 nm and was fabricated on a 220-nm silicon-on-insulator platform, using titanium-tungsten heating elements and aluminum interconnects. We experimentally demonstrate that the Bragg grating self-coupling coefficient can be effectively controlled in a range from 7 mm -1 to 110 mm -1 by thermal tuning, with a measured bandgap and sideband separation of 1 nm and 3 nm, respectively. The experimental results are in excellent agreement with simulations.

Optical antennas are a fundamental element in optical phased arrays (OPA) and free-space optical interconnects. An outstanding challenge in optical antenna design lies in achieving high radiation efficiency, ultra-compact footprint and broad radiation angle simultaneously, as required for dense 2D OPAs with a broad steering range. Here, we demonstrate a fundamentally new concept of a nanophotonic antenna based on near-field phase-engineering. By introducing a specific near-field phase factor in the Fraunhofer transformation, the far-field beam is widened beyond the diffraction limit for a given aperture size. We use transversally interleaved subwavelength grating nanostructures to control the near-field phase. A Bragg reflector is used at the end of the grating to increase both the efficiency and the far-field beam width. The antenna has a compact footprint of 3.1 µm × 1.75 µm and an ultra-broad far-field beam width of 52° and 62° in the longitudinal and transversal direction, respectively, while the radiation efficiency reaches 82% after incorporating a bottom reflector to further improve the directionality. This unprecedented design performance is achieved with a single-etch grating nanostructure in a 300-nm SOI platform., (© 2022. The Author(s).)

We present a comparative experimental study of three silicon photonic echelle grating demultiplexers that are integrated with a Mach-Zehnder interferometer (MZI) launch structure. By appropriate choice of the MZI configuration, the temperature induced shift of the demultiplexer channel wavelengths can be suppressed (athermal) or enhanced (super-thermal) or be controlled by an on-chip micro-heater. The latter two configurations allow the channel wavelengths to be actively tuned using lower power than possible by temperature tuning a conventional echelle demultiplexer. In the athermal configuration, the measured channel spectral shift is reduced to less than 10 pm/°C, compared to the 83 pm/°C shift for an unmodified echelle device. In super-thermal operation an enhanced channel temperature tuning rate of 170 pm/°C is achieved. Finally, by modulating the MZI phase with an on-chip heater, the demultiplexer channels can be actively tuned to correct for ambient temperature fluctuations up to 20 °C, using a drive current of less than 20 mA.

We present a novel, to the best of our knowledge, remote gas detection and identification technique based on correlation spectroscopy with a piezoelectric tunable fiber-optic Fabry-Perot filter. We show that the spectral correlation amplitude between the filter transmission window and gas absorption features is related to the gas absorption optical depth, and that different gases can be distinguished from one another using their correlation signal phase. Using a previously captured telluric-corrected high-resolution near-infrared spectrum of Venus, we show that the radial velocity of Venus can be extracted from the phase of higher order harmonic lock-in signals. This correlation spectroscopy technique has applications in the detection and radial velocity determination of weak spectral features in astronomy and remote sensing. We experimentally demonstrate a remote C O 2 detection system using a lock-in amplifier, fiber-optic Fabry-Perot filter, and single channel avalanche photodiode.

We show how existing iterative methods can be used to efficiently and accurately calculate Bloch periodic solutions of Maxwell's equations in arbitrary geometries. This is carried out in the complex-wavevector domain using a commercial frequency-domain finite-element solver that is available to the general user. The method is capable of dealing with leaky Bloch mode solutions, and is extremely efficient even for 3D geometries with non-trivial material distributions. We perform independent finite-difference time-domain simulations of Maxwell's equations to confirm our results. This comparison demonstrates that the iterative mode finder is more accurate, since it provides the true solutions in the complex-wavevector domain and removes the need for additional signal processing and fitting. Due to its efficiency, generality and reliability, this technique is well suited for complex and novel design tasks in integrated photonics, and also for a wider range of photonics problems.

Spectral filters are important building blocks for many applications in integrated photonics, including datacom and telecom, optical signal processing and astrophotonics. Sidewall-corrugated waveguide grating is typically the preferred option to implement spectral filters in integrated photonic devices. However, in the high-index contrast silicon-on-insulator (SOI) platform, designs with corrugation sizes of only a few tens of nanometers are often required, which hinders their fabrication. In this work, we propose a novel geometry to design complex Bragg filters with an arbitrary spectral response in silicon waveguides with laterally coupled Bragg loading segments. The waveguide core is designed to operate with a delocalized mode field, which helps reduce sensitivity to fabrication errors and increase accuracy on synthesized coupling coefficients and the corresponding spectral shape control. We present an efficient design strategy, based on the layer-peeling and layer-adding algorithms, that allows to readily synthesize an arbitrary target spectrum for our cladding-modulated Bragg gratings. The proposed filter concept and design methodology are validated by designing and experimentally demonstrating a complex spectral filter in an SOI platform, with 20 non-uniformly spaced spectral notches with a 3-dB linewidth as small as 210 pm.

We present a compact silicon-based surface grating antenna design with a high diffraction efficiency of 89% (-0.5 dB) and directionality of 0.94. The antenna is designed with subwavelength-based L-shaped radiating elements in a 300-nm silicon core, maintaining high efficiency with a compact footprint of 7.6 µm × 4.5 µm. The reflectivity remains below -10 dB over the S, C and L optical communication bands. A broad 1-dB bandwidth of 230 nm in diffraction efficiency is achieved with a central wavelength of 1550 nm.

Subwavelength grating (SWG) waveguides have been shown to provide enhanced light-matter interaction resulting in superior sensitivity in integrated photonics sensors. Narrowband integrated optical filters can be made by combining SWG waveguides with evanescently coupled Bragg gratings. In this paper, we assess the sensing capabilities of this novel filtering component with rigorous electromagnetic simulations. Our design is optimized for an operating wavelength of 1310 nm to benefit from lower water absorption and achieve narrower bandwidths than at the conventional wavelength of 1550 nm. Results show that the sensor achieves a sensitivity of 507 nm/RIU and a quality factor of 4.9 × 10 4 , over a large dynamic range circumventing the free spectral range limit of conventional devices. Furthermore, the intrinsic limit of detection, 5.1 × 10 -5 RIU constitutes a 10-fold enhancement compared to state-of-the-art resonant waveguide sensors.

Absorption spectroscopy is widely used in sensing and astronomy to understand remote molecular compositions. However, dispersive techniques require multichannel detection, reducing detection sensitivity while increasing instrument cost when compared to spectrophotometric methods. We present a novel non-dispersive infrared molecular detection and identification scheme that performs spectral correlation optically using a specially tailored integrated silicon ring resonator. We show experimentally that the correlation amplitude is proportional to the number of overlapping ring resonances and gas lines, and that molecular specificity can be achieved from the phase of the correlation signal. This strategy can enable on-chip detection of extremely faint remote spectral signatures.

Unlocking the full potential of pathology data by gaining computational access to histological pixel data and metadata (digital pathology) is one of the key promises of computational pathology. Despite scientific progress and several regulatory approvals for primary diagnosis using whole-slide imaging, true clinical adoption at scale is slower than anticipated. In the U.S., advances in digital pathology are often siloed pursuits by individual stakeholders, and to our knowledge, there has not been a systematic approach to advance the field through a regulatory science initiative. The Alliance for Digital Pathology ( the Alliance ) is a recently established, volunteer, collaborative, regulatory science initiative to standardize digital pathology processes to speed up innovation to patients. The purpose is: (1) to account for the patient perspective by including patient advocacy; (2) to investigate and develop methods and tools for the evaluation of effectiveness, safety, and quality to specify risks and benefits in the precompetitive phase; (3) to help strategize the sequence of clinically meaningful deliverables; (4) to encourage and streamline the development of ground-truth data sets for machine learning model development and validation; and (5) to clarify regulatory pathways by investigating relevant regulatory science questions. The Alliance accepts participation from all stakeholders, and we solicit clinically relevant proposals that will benefit the field at large. The initiative will dissolve once a clinical, interoperable, modularized, integrated solution (from tissue acquisition to diagnostic algorithm) has been implemented. In times of rapidly evolving discoveries, scientific input from subject-matter experts is one essential element to inform regulatory guidance and decision-making. The Alliance aims to establish and promote synergistic regulatory science efforts that will leverage diverse inputs to move digital pathology forward and ultimately improve patient care., Competing Interests: There are no conflicts of interest., (Copyright: © 2020 Journal of Pathology Informatics.)

Spectral pattern recognition is used to measure temperature and generate calibrated wavelength/frequency combs using a single silicon waveguide ring resonator. The ring generates two incommensurate interleaving TE and TM spectral combs that shift independently with temperature to create a spectral pattern that is unique at every temperature. Following an initial calibration, the ring temperature can be determined by recognizing the spectral resonance pattern, and as a consequence, the wavelength of every resonance is also known. Two methods of pattern-based temperature retrieval are presented. In the first method, the ring is locked to a previously determined temperature set-point defined by the coincidence of only two specific TE and TM cavity modes. Based on a prior calibration at the set-point, the ring temperature and hence all resonance wavelengths are then known and the resulting comb can be used as a wavelength calibration reference. In this configuration, all reference comb wavelengths have been reproduced within a 5 pm accuracy across an 80 nm range by using an on-chip micro-heater to tune the ring. For more general photonic thermometry, a spectral correlation algorithm is developed to recognize a resonance pattern across a 30 nm wide spectral window and thereby determine ring temperature continuously to 50 mK accuracy. The correlation method is extended to simultaneously determine temperature and to identify and correct for wavelength calibration errors in the interrogating light source. The temperature and comb wavelength accuracy is limited primarily by the linewidth of the ring resonances, with accuracy and resolution scaling with the ring quality factor.

We report on the design, fabrication and characterization of subwavelength grating metamaterial waveguides coated with tellurium oxide. The structures are first fabricated using a standard CMOS compatible process on a silicon-on-insulator platform. Amorphous tellurium oxide top cladding material is then deposited via post-process RF magnetron sputtering. The photonic bandstructure is controlled by adjustment of the device geometry, opening a wide range of operating regimes, including subwavelength propagation, slow light and the photonic bandgap, for various wavelength bands within the 1550 nm telecommunications window. Propagation loss of 1.0 ± 0.1 dB/mm is reported for the tellurium oxide-cladded device, compared to 1.5 ± 0.1 dB/mm propagation loss reported for the silicon dioxide-cladded reference structure. This is the first time that a high-index (n > 2) oxide cladding has been demonstrated for subwavelength grating metamaterial waveguides, thus introducing a new material platform for on-chip integrated optics.

In integrated optical circuits light typically travels in waveguides which provide both vertical and horizontal confinement, enabling efficient routing between different parts of the chip. However, for a variety of applications, including on-chip wireless communications, steerable phased arrays or free-space inspired integrated optics, optical beams that can freely propagate in the horizontal plane of a 2D slab waveguide are advantageous. Here we present a distributed Bragg deflector that enables well controlled coupling from a waveguide mode to such a 2D on-chip beam. The device consists of a channel waveguide and a slab waveguide region separated by a subwavelength metamaterial spacer to prevent uncontrolled leakage of the guided mode. A blazed grating in the waveguide sidewall is used to gradually diffract light into the slab region. We develop a computationally efficient strategy for designing gratings that generate arbitrarily shaped beams. As a proof-of-concept we design, in the silicon-on-insulator platform, a compact ×75 Gaussian beam expander and a partial beam deflector. For the latter, we also demonstrate a prototype device with experimental results showing good agreement with our theoretical predictions. We also demonstrate via a rigorous simulation that two such couplers in a back-to-back configuration efficiently couple light, suggesting that these devices can be used as highly directive antennas in the chip plane.

Nanophotonics finds ever broadening applications requiring complex components with many parameters to be simultaneously designed. Recent methodologies employing optimization algorithms commonly focus on a single performance objective, provide isolated designs, and do not describe how the design parameters influence the device behaviour. Here we propose and demonstrate a machine-learning-based approach to map and characterize the multi-parameter design space of nanophotonic components. Pattern recognition is used to reveal the relationship between an initial sparse set of optimized designs through a significant reduction in the number of characterizing parameters. This defines a design sub-space of lower dimensionality that can be mapped faster by orders of magnitude than the original design space. The behavior for multiple performance criteria is visualized, revealing the interplay of the design parameters, highlighting performance and structural limitations, and inspiring new design ideas. This global perspective on high-dimensional design problems represents a major shift in modern nanophotonic design and provides a powerful tool to explore complexity in next-generation devices.

An accurate model for the silicon refractive index including its temperature and wavelength dependence is critically important for many disciplines of science and technology. Currently, such a model for temperatures above 22°C in the optical communication bands is not available. The temperature dependence in the spectral response of integrated echelle grating filters made in silicon-on-insulator is solely determined by the optical properties of the slab waveguide, making it largely immune to dimensional uncertainties. This feature renders the echelle filters a reliable tool to evaluate the thermo-optic properties of silicon. Here we investigate the temperature dependence of silicon echelle filters for the wavelength range of both O and C bands, measured between 22°C to 80°C. We show that if a constant thermo-optic coefficient of silicon is assumed for each band, as is common in the literature, the predictions show an underestimate of up to 10% in the temperature-induced channel wavelength shift. We propose and assess a model of silicon refractive index that encompasses both the wavelength and temperature dependence of its thermo-optic coefficients. We start from literature data for bulk silicon and further refine the model using the echelle filter measurement results. This model is validated through accurate predictions of device channel wavelengths and their temperature dependence, including the quadratic term, over a wide wavelength and temperature range. This work also demonstrates a new high-precision method for characterizing the optical properties of a variety of materials.

Athermal design of integrated photonic devices can reduce the need for active temperature stabilization and consequently the energy required to operate photonic integrated circuits. For silicon photonic filters such as AWGs which employ wire or ridge waveguides, temperature insensitivity can be achieved using cladding materials with negative thermo-optic coefficients. On the other hand, in echelle grating filters the inteference takes place in the slab free-propagation region, and therefore the modal overlap with the cladding is small, rendering this method ineffective. In this work we present an approach to design an athermal echelle grating filter exploiting a temperature-synchronized Mach-Zehnder interferometer as input. This reduces the spectral shift over a temperature range of 20 K to less than ±45 pm compared to the 1.6 nm shift for the same echelle grating with a conventional waveguide input. Furthermore, the proposed design relies exclusively on a standard fabrication process for silicon-on-insulator photonic devices and exhibits a good tolerance to fabrication uncertainties.

In the late nineteenth century, Heinrich Hertz demonstrated that the electromagnetic properties of materials are intimately related to their structure at the subwavelength scale by using wire grids with centimetre spacing to manipulate metre-long radio waves. More recently, the availability of nanometre-scale fabrication techniques has inspired scientists to investigate subwavelength-structured metamaterials with engineered optical properties at much shorter wavelengths, in the infrared and visible regions of the spectrum. Here we review how optical metamaterials are expected to enhance the performance of the next generation of integrated photonic devices, and explore some of the challenges encountered in the transition from concept demonstration to viable technology.

Properties of reflection and transmission spectral filters based on Bragg gratings in subwavelength grating (SWG) metamaterial waveguides on silicon-on-insulator platform have been analyzed using proprietary 2D and 3D simulation tools based on Fourier modal method and the coupled-mode theory. We also demonstrate that the coupled Bloch mode theory can be advantageously applied to design of Bragg gratings in SWG waveguides. By combining different techniques, including judiciously positioning silicon loading segments within the evanescent field of the SWG waveguide and making use of its dispersion properties, it is possible to attain sub-nanometer spectral bandwidths for both reflection and transmission filters in the wavelength range of 1550 nm while keeping minimum structural features of the filters as large as 100 nm. Numerical simulations have also shown that a few nanometer jitter in the size and position of Si segments is well tolerated in our filter designs.

Subwavelength grating (SWG) waveguides are integrated photonic structures with a pitch substantially smaller than wavelength for which they are designed, so that diffraction effects are suppressed. SWG operates as an artificial metamaterial with an equivalent refractive index which depends on the geometry of the structure and the polarization of the propagating wave. SWG waveguides have been advantageously used in silicon photonics, resulting in significant performance improvements for many practical devices, including highly efficient fiber-chip couplers, waveguide crossings, broadband multimode interference (MMI) couplers, evanescent field sensors and polarization beam splitters, to name a few. Here we present a theoretical and experimental study of the influence of disorder effects in SWG waveguides. We demonstrate via electromagnetic simulations and experimental measurements that even a comparatively small jitter (~5 nm) in the position and size of the SWG segments may cause a dramatic reduction in the transmittance for wide (multimode) SWG waveguides, while for narrow (single mode) waveguides this effect is negligible. Our study shows that the impact of the jitter on SWG waveguide performance is directly related to the modal confinement.

We report, for the first time, on the design and experimental demonstration of fiber-chip surface grating couplers based on subwavelength grating engineered nanostructure operating in the low fiber chromatic dispersion window (around 1.3 μm wavelengths), which is of great interest for short-reach data communication applications. Our coupler designs meet the minimum feature size requirements of large-volume deep-ultraviolet stepper lithography processes. The fiber-chip couplers are implemented in a standard 220-nm-thick silicon-on-insulator (SOI) platform and are fabricated by using a single etch process. Several types of couplers are presented, specifically the uniform, the apodized, and the focusing designs. The measured peak coupling efficiency is -2.5 dB (56%) near the central wavelength of 1.3 μm. In addition, by utilizing the technique of the backside substrate metallization underneath the grating couplers, the coupling efficiency of up to -0.5 dB (89%) is predicted by Finite Difference Time Domain (FDTD) calculations.

Coupling light between an optical fiber and a silicon nanophotonic waveguide is a challenge facing the field of silicon photonics to which various mode converters have been proposed. Inverted tapers stand out as a practical solution enabling efficient and broadband mode conversion. Current design approaches often use linearly-shaped tapers and two dimensional approximations; however, these approaches have not been rigorously verified and there is not an overarching design framework to guide the design process. Here, using a Lagrangian formulation, we propose an original, constant-loss framework for designing shape-controlled photonic devices and apply this formalism to derive an ideal constant-loss taper (CLT). We specifically report on the experimental demonstration of a fabrication-tolerant, 15-µm-long CLT coupler, that produces 0.56 dB fiber-chip coupling efficiency, the highest efficiency-per-length ratio ever reported.

Fiber-chip edge couplers are extensively used in integrated optics for coupling of light between planar waveguide circuits and optical fibers. In this work, we report on a new fiber-chip edge coupler concept with large mode size for silicon photonic wire waveguides. The coupler allows direct coupling with conventional cleaved optical fibers with large mode size while circumventing the need for lensed fibers. The coupler is designed for 220 nm silicon-on-insulator (SOI) platform. It exhibits an overall coupling efficiency exceeding 90%, as independently confirmed by 3D Finite-Difference Time-Domain (FDTD) and fully vectorial 3D Eigenmode Expansion (EME) calculations. We present two specific coupler designs, namely for a high numerical aperture single mode optical fiber with 6 µm mode field diameter (MFD) and a standard SMF-28 fiber with 10.4 µm MFD. An important advantage of our coupler concept is the ability to expand the mode at the chip edge without leading to high substrate leakage losses through buried oxide (BOX), which in our design is set to 3 µm. This remarkable feature is achieved by implementing in the SiO 2 upper cladding thin high-index Si 3 N 4 layers. The Si 3 N 4 layers increase the effective refractive index of the upper cladding near the facet. The index is controlled along the taper by subwavelength refractive index engineering to facilitate adiabatic mode transformation to the silicon wire waveguide while the Si-wire waveguide is inversely tapered along the coupler. The mode overlap optimization at the chip facet is carried out with a full vectorial mode solver. The mode transformation along the coupler is studied using 3D-FDTD simulations and with fully-vectorial 3D-EME calculations. The couplers are optimized for operating with transverse electric (TE) polarization and the operating wavelength is centered at 1.55 µm.

Coupling of light to and from integrated optical circuits has been recognized as a major practical challenge since the early years of photonics. The coupling is particularly difficult for high index contrast waveguides such as silicon-on-insulator, since the cross-sectional area of silicon wire waveguides is more than two orders of magnitude smaller than that of a standard single-mode fiber. Here, we experimentally demonstrate unprecedented control over the light coupling between the optical fiber and silicon chip by constructing the nanophotonic coupler with ultra-high coupling efficiency simultaneously for both transverse electric and transverse magnetic polarizations. We specifically demonstrate a subwavelength refractive index engineered nanostructure to mitigate loss and wavelength resonances by suppressing diffraction effects, enabling a coupling efficiency over 92% (0.32 dB) and polarization independent operation for a broad spectral range exceeding 100 nm.

Surface grating couplers are fundamental components in chip-based photonic devices to couple light between photonic integrated circuits and optical fibers. In this work, we report on a grating coupler with sub-decibel experimental coupling efficiency using a single etch process in a standard 220-nm silicon-on-insulator (SOI) platform. We specifically demonstrate a subwavelength metamaterial refractive index engineered nanostructure with backside metal reflector, with the measured peak fiber-chip coupling efficiency of -0.69 dB (85.3%) and 3 dB bandwidth of 60 nm. This is the highest coupling efficiency hitherto experimentally achieved for a surface grating coupler implemented in 220-nm SOI platform.

We propose a fabrication tolerant polarization splitter and rotator (PSR) on the silicon-on-insulator platform based on the mode-coupling mechanism. The PSR consists of a silicon wire waveguide coupled to a taper-etched waveguide. Compared to previously reported PSRs based on directional couplers which are sensitive to fabrication variations, the partially etched taper structure can compensate for fabrication inaccuracies. In addition, the taper-etched geometry breaks both the horizontal and vertical symmetries of the waveguide, introducing an additional degree of design freedom to accommodate different upper cladding layers. The proposed PSR can be readily integrated in a planar waveguide circuit using e.g. SiO(2) cladding, making it compatible with typical metal back-end-of-line processes. Our simulation results show that the PSR has a low TM-to-TE polarization conversion loss of -0.09 dB in the C-band (or a conversion efficiency of 98%). A low TE-to-TE through insertion loss (-0.07 dB) and a very low polarization crosstalk (-30 dB) over a wide wavelength range exceeding 160 nm with a large fabrication tolerance (>50 nm) are numerically demonstrated.

A complete photonic wire molecular biosensor microarray chip architecture and supporting instrumentation is described. Chip layouts with 16 and 128 independent sensors have been fabricated and tested, where each sensor can provide an independent molecular binding curve. Each sensor is 50 μm in diameter, and consists of a millimeter long silicon photonic wire waveguide folded into a spiral ring resonator. An array of 128 sensors occupies a 2 × 2 mm2 area on a 6 × 9 mm2 chip. Microfluidic sample delivery channels are fabricated monolithically on the chip. The size and layout of the sensor array is fully compatible with commercial spotting tools designed to independently functionalize fluorescence based biochips. The sensor chips are interrogated using an instrument that delivers sample fluid to the chip and is capable of acquiring up to 128 optical sensor outputs simultaneously and in real time. Coupling light from the sensor chip is accomplished through arrays of sub-wavelength surface grating couplers, and the signals are collected by a fixed two-dimensional detector array. The chip and instrument are designed so that connection of the fluid delivery system and optical alignment are automated, and can be completed in a few seconds with no active user input. This microarray system is used to demonstrate a multiplexed assay for serotyping E. coli bacteria using serospecific polyclonal antibody probe molecules.

For silicon wire based ring resonator biosensors, we investigate the simultaneous retrieval of changes in the fluidic refractive index ∆n(c) and surface adsorbed molecular film thickness ∆d(F). This can be achieved by monitoring the resonance shifts of the sensors operating in the TE and TM polarizations at the same time. Although this procedure is straightforward in principle, significant retrieval errors can be introduced due to deviations in the sensor waveguide cross-sections from their nominal values in the range commonly encountered for silicon photonic wire devices. We propose a method of determining the fabricated waveguide size using the group indices derived from measured free spectral range (FSR) of the resonators. We further demonstrate that using experimentally measured group index values, the waveguide size can be determined to accuracies of ± 2 nm in width and ± 1 nm in height. By using this procedure, ∆n(c) and ∆d(F) can be obtained to a precision of within 10% of the true values using optically measurable parameters, improving the retrieval accuracy by more than 3 times.

We experimentally demonstrate a new type of waveguide multiplexer device designed for silicon photonics, with a crosstalk level as low as -35 dB and an operational wavelength range of 300 nm. A compact device footprint of only 100 × 160 µm2 offers an excellent potential for integration with other silicon nanophotonic circuits.

In this paper, athermal silicon waveguides using bridged subwavelength grating (BSWG) structures are proposed and investigated. The realization of temperature-independent BSWG waveguides for both polarizations is demonstrated numerically and experimentally. SU-8 polymer is used as the cladding material to compensate for the positive thermo-optic (TO) coefficient (dn/dT) of silicon. We investigate the dependence of the effective TO coefficient of BSWG waveguides on both the bridge width and grating duty cycle. The BSWG waveguides have a width of 490 nm, a height of 260 nm, and a grating pitch of 250 nm. Athermal behavior is achieved for both the transverse-magnetic (TM) and the transverse-electric (TE) polarized light for a variety of bridge width and duty cycle combinations. Furthermore, the BSWGs can be designed to be athermal for both TE and TM polarization simultaneously.

Directional couplers are extensively used devices in integrated optics, but suffer from limited operational wavelength range. Here we use, for the first time, the dispersive properties of sub-wavelength gratings to achieve a fivefold enhancement in the operation bandwidth of a silicon-on-insulator directional coupler. This approach does not compromise the size or the phase response of the device. The sub-wavelength grating based directional coupler we propose covers a 100 nm bandwidth with an imbalance of ≤ 0.6 dB between its outputs, as supported by full 3D FDTD simulations.

We report on the experimental demonstration of ultrafast all-optical switching and wavelength down-conversion based on a novel nonlinear Mach-Zehnder interferometer with subwavelength grating and wire waveguides. Unlike other periodic waveguides such as line-defects in a 2D photonic crystal lattice, a subwavelength grating waveguide confines the light as a conventional index-guided structure and does not exhibit optically resonant behaviour. Since the device had no dedicated port to input optical signal to control switching a new approach was also implemented for all-optical switching control.

A comprehensive investigation of real-time temperature-induced resonance shift cancellation for silicon wire based biosensor arrays is reported for the first time. A reference resonator, protected by either a SU8 or SiO(2) cladding layer, is used to track temperature changes. The temperature dependence of resonators in aqueous solutions, pertinent to biosensing applications, is measured under steady-state conditions and the operating parameters influencing these properties are discussed. Real-time measurements show that the reference resonator resonances reflect the temperature changes without noticeable time delay, enabling effective cancellation of temperature-induced shifts. Binding between complementary IgG protein pairs is monitored over 4 orders of magnitude dynamic range down to a concentration of 20 pM, demonstrating a resolvable mass of 40 attograms. Reactions are measured over time periods as long as 3 hours with high stability, showing a scatter corresponding to a fluid refractive index fluctuation of ± 4 × 10(-6) in the baseline data. Sensor arrays with a SU8 protective cladding are easy to fabricate, while oxide cladding is found to provide superior stability for measurements involving long time scales.

We report on the experimental demonstration and analysis of a new waveguide principle using subwavelength gratings. Unlike other periodic waveguides such as line-defects in a 2D photonic crystal lattice, a subwavelength grating waveguide confines the light as a conventional index-guided structure and does not exhibit optically resonant behaviour. Subwavelength grating waveguides in silicon-on-insulator are fabricated with a single etch step and allow for flexible control of the effective refractive index of the waveguide core simply by lithographic patterning. Experimental measurements indicate a propagation loss as low as 2.1 dB/cm for subwavelength grating waveguides with negligible polarization and wavelength dependent loss, which compares favourably to conventional microphotonic silicon waveguides. The measured group index is nearly constant n(g) ~1.5 over a wavelength range exceeding the telecom C-band.

We report on the design, simulation and experimental demonstration of a new type of waveguide crossing based on subwavelength gratings in silicon waveguides. We used 3D finite-difference time-domain simulations to minimize loss, crosstalk and polarization dependence. Measurement of fabricated devices show that our waveguide crossings have a loss as low as -0.023 dB/crossing, polarization dependent loss of < 0.02 dB and crosstalk <-40 dB.

We present an ultra-compact comb filter using an add-drop ring resonator with an Archimedean spiral cavity. The cavity consists of two interleaved spiral branches which are connected in the center using arcs of circle of a radius that causes minimum bend loss. We describe the design procedure and examine the physical parameters governing the resonator performance. As an example, we demonstrate experimentally a comb filter with a 25 GHz channel spacing made of silicon photonic wires and only occupies an area of 80 x 90 microm(2), approximately a 70 fold size reduction compared to a racetrack resonator. The filter transmission is free of spurious reflections, attesting to the smooth transition between different sections of the resonator cavity. Over a 40 channel wavelength span, the filter exhibits a quality factor Q > 35,000, extinction ratios > 10 dB, and an excellent power uniformity with variations < 0.5 dB for both the through and drop ports.

We report on several new types of sub-wavelength grating (SWG) gradient index structures for efficient mode coupling in high index contrast slab waveguides. Using a SWG, an adiabatic transition is achieved at the interface between silicon-on-insulator waveguides of different geometries. The SWG transition region minimizes both fundamental mode mismatch loss and coupling to higher order modes. By creating the gradient effective index region in the direction of propagation, we demonstrate that efficient vertical mode transformation can be achieved between slab waveguides of different core thickness. The structures which we propose can be fabricated by a single etch step. Using 3D finite-difference time-domain simulations we study the loss, polarization dependence and the higher order mode excitation for two types (triangular and triangular-transverse) of SWG transition regions between silicon-on-insulator slab waveguides of different core thicknesses. We demonstrate two solutions to reduce the polarization dependent loss of these structures. Finally, we propose an implementation of SWG structures to reduce loss and higher order mode excitation between a slab waveguide and a phase array of an array waveguide grating (AWG). Compared to a conventional AWG, the loss is reduced from -1.4 dB to < -0.2 dB at the slab-array interface.

A method is developed for extracting the coupling and loss coefficients of ring resonators from the peak widths, depths, and spacings of the resonances of a single resonator. Although the formulas used do not distinguish which coefficient is coupling and which is loss, it is shown how these coefficients can be disentangled based on how they vary with wavelength or device parameters.

We present experimental and theoretical results of label-free molecular sensing using the transverse magnetic mode of a 0.22 mum thick silicon slab waveguide with a surface grating implemented in a guided mode resonance configuration. Due to the strong overlap of the evanescent field of the waveguide mode with a molecular layer attached to the surface, these sensors exhibit high sensitivity, while their fabrication and packaging requirements are modest. Experimentally, we demonstrate a resonance wavelength shift of approximately 1 nm when a monolayer of the protein streptavidin is attached to the surface, in good agreement with calculations based on rigorous coupled wave analysis. In our current optical setup this shift corresponds to an estimated limit of detection of 0.2% of a monolayer of streptavidin.

We present the design and numerical simulation results for a silicon waveguide modulator based on carrier depletion in a linear array of periodically interleaved PN junctions that are oriented perpendicular to the light propagation direction. In this geometry the overlap of the optical waveguide mode with the depletion region is much larger than in designs using a single PN junction aligned parallel to the waveguide propagation direction. Simulations predict that an optimized modulator will have a high modulation efficiency of 0.56 V x cm for a 3 V bias, with a 3 dB frequency bandwidth of over 40 GHz. This device has a length of 1.86 mm with a maximum intrinsic loss of 4.3 dB at 0 V bias, due to free carrier absorption.

By exploiting the small bend radius achievable using high-index-contrast silicon photonic wire waveguides, we demonstrate a new low power thermo-optic switch arranged in a dense, double spiral geometry. Such a design permits the waveguide length to be extended for increased phase shift, without the need for increased heated volume. This provides an effective means to reduce the power consumption of thermo-optic switches, as well as a compact geometry desirable for the development of switch arrays. A low switching power of 6.5 mW was obtained for a spiral-path Mach-Zehnder interferometer device having a 10% - 90% rise time of 14 micros. The switching power is shown to be reduced by more than 5 times compared to a Mach-Zehnder interferometer employing a conventional straight waveguide geometry.

We propose an original diffraction grating demultiplexer device with a very small footprint, designed for the silicon-on-insulator waveguide platform. The wavelength dispersive properties are provided by a second-order diffraction grating designed to be lithographically defined and etched in the sidewall of a curved Si waveguide. The grating is blazed to maximize the -1st order diffraction efficiency. The diffracted light is coupled into the silicon slab waveguide via an impedance matching subwavelength grating gradient index antireflective interface. The waveguide is curved in order to focus the light onto the Rowland circle, where different wavelengths are intercepted by different receiver waveguides. The phase errors were substantially reduced using an apodized design with a chirped grating, which assures a constant effective index along the grating length. The simulated crosstalk is -30 dB. The device has 15 channels with a spacing of 25 nm, thus a broadband operational bandwidth of 375 nm. Its performance approaches the diffraction limit. The layout size is 90 microm x 140 microm, which is the smallest footprint yet reported for a mux/dmux device of a similar performance.

We demonstrate by numerical simulations and experiments that highly reflective (HR) facets can be formed on silicon waveguides with high reflectivity diffraction gratings. We use an HR grating with a plane wave reflectivity exceeding 99.99%, as calculated by rigorous coupled wave analysis. Experimentally, we demonstrate the HR effect for silicon-on-insulator waveguide facets patterned lithographically with grating structures. Due to a strong mode size dependence, the maximum facet reflectivity for 1.5 microm thick waveguide is 77%, but finite difference time-domain simulations show that modal reflectivies larger than 90% can be achieved for silicon waveguides with thicknesses of 4 microm or more.